{"id":"W4294316291","doi":"10.1364/oic.2022.wb.5","title":"Effects of Annealing on Residual Stress in Titania Germania Mixtures Deposited by Ion Beam Sputtering","year":2022,"lang":"en","type":"article","venue":"Optical Interference Coatings Conference (OIC) 2022","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Montréal","funders":"","keywords":"Residual stress; Materials science; Annealing (glass); Sputtering; Sputter deposition; Ion beam; Thin film; Ion; Ion beam-assisted deposition; Stress (linguistics); Optoelectronics; Composite material; Metallurgy; Beam (structure); Optics; Nanotechnology; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002229178,0.0004006432,0.0004172513,0.0001783067,0.00031952,0.0004887171,0.000228176,0.0003186144,0.001321805],"category_scores_gemma":[0.0006048613,0.0003153103,0.0002124992,0.0002542512,0.0003868994,0.000302537,0.0002507145,0.0004030243,0.0001979715],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002929712,"about_ca_system_score_gemma":0.000182211,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001927193,"about_ca_topic_score_gemma":0.002673817,"domain_scores_codex":[0.9997553,0.00002631554,0.00002706421,0.00005148345,0.00007250678,0.00006735873],"domain_scores_gemma":[0.9995916,0.0001554665,0.00009962756,0.00003475565,0.00009194101,0.00002647431],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002266162,0.00001185308,0.000602547,0.00005994934,0.00001939759,0.00009347346,0.00009669379,0.0002141013,0.9976863,0.00002425112,0.00003112363,0.0009337408],"study_design_scores_gemma":[0.000012355,0.0003663375,0.005508288,0.000005333477,0.00002627469,0.00004716498,0.00006993798,0.0007760098,0.9927016,0.00001182909,0.000465205,0.00000966141],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9981449,0.0008604943,0.0003192467,0.00004406266,0.00001908145,0.000009212256,0.000073421,0.00002738019,0.0005022539],"genre_scores_gemma":[0.9989429,0.0003021538,0.0003157441,0.00001872445,0.000007206448,0.000006315264,0.00006904484,0.00002144678,0.0003163976],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001927193,"threshold_uncertainty_score":0.00442183,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00983955414803814,"score_gpt":0.2126469479328564,"score_spread":0.2028073937848182,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}