{"id":"W4297229178","doi":"","title":"Design, fabrication and characterization of a piezoelectric MEMS, vibration energy scavenging","year":2007,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Fabrication; Microelectromechanical systems; Vibration; Characterization (materials science); Piezoelectricity; Energy harvesting; Materials science; Scavenging; Energy (signal processing); Acoustics; Optoelectronics; Composite material; Nanotechnology; Physics; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004623915,0.0003473653,0.0004791899,0.0004221274,0.0004923689,0.0006061809,0.0009767323,0.0008670465,0.002428388],"category_scores_gemma":[0.0005512827,0.0004562153,0.0002963835,0.0003140626,0.0002814278,0.0005618546,0.0003810533,0.0003861433,0.00108751],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004567298,"about_ca_system_score_gemma":0.0008720883,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005798847,"about_ca_topic_score_gemma":0.001181041,"domain_scores_codex":[0.9995108,0.00001641699,0.00002281443,0.0001145253,0.0003006855,0.00003481162],"domain_scores_gemma":[0.9995933,0.00007792051,0.00007808313,0.0000646179,0.0001522793,0.00003379766],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004701298,0.00004190215,0.00038617,0.0001252944,0.00001487663,0.00007272663,0.00005762266,0.000453247,0.9876525,0.0004512241,0.0009610103,0.009736435],"study_design_scores_gemma":[0.00007338678,0.0008549763,0.008266019,0.00002009216,0.00006371116,0.0005117464,0.00005171743,0.006465753,0.9614514,0.0001795255,0.02203939,0.00002229547],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.7615469,0.003880827,0.2004938,0.001992416,0.001262139,0.001584199,0.002178976,0.002377737,0.02468294],"genre_scores_gemma":[0.828011,0.001219485,0.131636,0.0004446177,0.0001425649,0.0007206435,0.0008785191,0.0001577634,0.03678944],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.002428388,"threshold_uncertainty_score":0.008123755,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01082665045589354,"score_gpt":0.2018793193858807,"score_spread":0.1910526689299872,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}