{"id":"W4297585557","doi":"10.1021/acsaenm.2c00001","title":"Electrochemical Grafting of an Aminated Poly(methyl methacrylate) (PMMA)-like Liner onto a Silicon Surface for the Metallization of Microfeatures","year":2022,"lang":"en","type":"article","venue":"ACS Applied Engineering Materials","topic":"Molecular Junctions and Nanostructures","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"CMC Microsystems (Canada)","funders":"","keywords":"Passivation; Materials science; Amination; Methyl methacrylate; Chemical engineering; Silicon; Electrochemistry; Polymer; Layer (electronics); Poly(methyl methacrylate); Deposition (geology); Aqueous solution; Electrolyte; Polymer chemistry; Polymerization; Nanotechnology; Electrode; Composite material; Organic chemistry; Chemistry; Optoelectronics; Catalysis","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001195278,0.0002927738,0.0001078052,0.0001205138,0.0001056894,0.0001652881,0.0002957114,0.0002109675,0.000781864],"category_scores_gemma":[0.0001593576,0.0001462457,0.000147001,0.00009056416,0.0001511758,0.0002729367,0.0001902291,0.0003472248,0.0003303231],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001545484,"about_ca_system_score_gemma":0.0000968101,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001380513,"about_ca_topic_score_gemma":0.0003090895,"domain_scores_codex":[0.9999151,0.000009049986,0.000006153958,0.00002405338,0.00002934,0.0000162444],"domain_scores_gemma":[0.999897,0.00001839161,0.00004492662,0.00001896641,0.000009184047,0.0000114784],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000005128496,0.000004418482,0.00002861878,0.00001217215,0.000001185097,0.00001560134,0.000007029606,0.00002129111,0.9993006,0.00005789787,0.000007473319,0.0005386207],"study_design_scores_gemma":[0.000001584011,0.00004404307,0.0003173851,0.000001043842,0.000001985677,0.00005364395,0.000004302144,0.0003778049,0.998753,0.0000109069,0.0004329698,0.000001441216],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9782839,0.0006600925,0.0183492,0.0001033809,0.00004083464,0.00004355281,0.00007537167,0.0001602896,0.002283384],"genre_scores_gemma":[0.9862339,0.000404276,0.0117976,0.00002819185,0.00001060466,0.00001461201,0.00004899917,0.00001676654,0.00144502],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.000781864,"threshold_uncertainty_score":0.002615571,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004559196141884684,"score_gpt":0.1956972727308975,"score_spread":0.1911380765890128,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}