{"id":"W4299565230","doi":"10.31399/asm.edfa.2003-4.p013","title":"Failure Analysis Turned Upside Down: A Review of Backside Analysis Techniques","year":2003,"lang":"en","type":"review","venue":"EDFA Technical Articles","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Polishing; Materials science; Laser; Waveform; Optoelectronics; Microscopy; Laser ablation; Etching (microfabrication); Voltage; Optics; Nanotechnology; Electrical engineering; Engineering; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001121257,0.001106371,0.00202922,0.004792535,0.0003819737,0.001242562,0.001501926,0.001175651,0.002613633],"category_scores_gemma":[0.001705809,0.0006975476,0.0007941202,0.002769243,0.0005834394,0.001924597,0.0004901282,0.0008954535,0.003314307],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004241171,"about_ca_system_score_gemma":0.0008318104,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00166529,"about_ca_topic_score_gemma":0.00181422,"domain_scores_codex":[0.9992218,0.0001045489,0.00008983381,0.0001672182,0.0003845381,0.0000320934],"domain_scores_gemma":[0.9983639,0.0007183456,0.0001442589,0.00007032154,0.00066458,0.00003861138],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00005153268,0.00008584788,0.0003877112,0.00896657,0.00008723398,0.0003060815,0.00008806837,0.0006071721,0.005632521,0.001394601,0.006089748,0.9763029],"study_design_scores_gemma":[0.00003581118,0.0005658895,0.004852685,0.009037322,0.0004093155,0.008644016,0.0002757549,0.001794583,0.02028311,0.004768806,0.9491886,0.0001442261],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"review","genre_gemma":"review","genre_scores_codex":[0.00056141,0.9932923,0.004237911,0.0001082123,0.000146199,0.00001272008,0.0000213532,0.0000347313,0.001585264],"genre_scores_gemma":[0.003927683,0.9861271,0.007116978,0.0001749539,0.0002212649,0.00002735123,0.00005768755,0.0000199653,0.002326982],"genre_candidate":"review","genre_consensus":"review","teacher_disagreement_score":0.004792535,"threshold_uncertainty_score":0.008743465,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02120176337868382,"score_gpt":0.2842044435382389,"score_spread":0.2630026801595551,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}