{"id":"W4300523346","doi":"","title":"The nanodamascene process: a versatile fabrication technique for nanoelectronic applications","year":2015,"lang":"en","type":"article","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Fabrication; Process (computing); Computer science; Materials science; Computer architecture; Nanotechnology; Operating system; Medicine","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002376772,0.0004194502,0.0002382297,0.0005729945,0.0005693267,0.0005397275,0.0004314984,0.0004047596,0.004378774],"category_scores_gemma":[0.0002127993,0.0002831959,0.0002028221,0.000373387,0.0004975396,0.0008413694,0.0006221348,0.0005923717,0.00180895],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005223894,"about_ca_system_score_gemma":0.000486232,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006071126,"about_ca_topic_score_gemma":0.002422448,"domain_scores_codex":[0.9997687,0.000009648928,0.000008260968,0.00004238287,0.0001429604,0.00002807076],"domain_scores_gemma":[0.9999145,0.0000147687,0.00002188658,0.00001537258,0.0000184864,0.00001492416],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00006130802,0.00001862164,0.0001328469,0.0001867977,0.000007688403,0.000210823,0.0001214626,0.0003182687,0.9714352,0.003554107,0.003861998,0.020091],"study_design_scores_gemma":[0.00000919691,0.00004149381,0.0004269173,0.00001535813,0.000004340743,0.000275135,0.00001871266,0.0007382529,0.9427953,0.000413666,0.05524464,0.00001693036],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.5533702,0.04209984,0.2179451,0.00496498,0.00424481,0.000822085,0.00345284,0.004233069,0.1688671],"genre_scores_gemma":[0.8264002,0.0172129,0.05911079,0.0004620964,0.0003114089,0.0002146432,0.001197167,0.0006175208,0.09447328],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.004378774,"threshold_uncertainty_score":0.01464844,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01136894656341581,"score_gpt":0.2218485497116905,"score_spread":0.2104796031482747,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}