{"id":"W4301594600","doi":"10.26434/chemrxiv-2022-20mll","title":"Plasma-Enhanced Molecular Layer Deposition of Phosphane-ene Polymer Films","year":2022,"lang":"en","type":"preprint","venue":"ChemRxiv","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University; Western University","funders":"Ontario Ministry of Research and Innovation; Natural Sciences and Engineering Research Council of Canada","keywords":"Quartz crystal microbalance; X-ray photoelectron spectroscopy; Siloxane; Polymer; Deposition (geology); Atomic layer deposition; Layer (electronics); Phosphine; Materials science; Chemical engineering; Phase (matter); Radical; Analytical Chemistry (journal); Chemistry; Nanotechnology; Organic chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009458367,0.0003845642,0.0001799225,0.0002547216,0.000124805,0.0001999774,0.0002546177,0.0002616484,0.002028519],"category_scores_gemma":[0.000146078,0.0002030727,0.0001597776,0.0002214518,0.00009750067,0.000222935,0.0002235291,0.000435724,0.0006098641],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001660876,"about_ca_system_score_gemma":0.00009602446,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001717894,"about_ca_topic_score_gemma":0.0003033853,"domain_scores_codex":[0.9999224,0.000005428817,0.000004860775,0.00002592304,0.00002309762,0.0000182294],"domain_scores_gemma":[0.9999425,0.00001764565,0.00001158007,0.00001089608,0.000009780673,0.000007625976],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008039271,0.00000373063,0.00001423472,0.00002798122,0.000001436253,0.0000160826,0.000005428341,0.00003212199,0.999134,0.00005092609,0.00002304354,0.0006829797],"study_design_scores_gemma":[0.000002375136,0.00002905309,0.0002807003,0.000001484469,0.000002342334,0.00003386978,0.000002311599,0.0002418595,0.9982207,0.00001079114,0.001173532,9.461567e-7],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9670173,0.001675454,0.02224818,0.0001020604,0.00006945834,0.00009316019,0.001052628,0.0005572696,0.007184473],"genre_scores_gemma":[0.9700743,0.001437129,0.02187209,0.00004420802,0.00002407715,0.00008727341,0.0007568647,0.00008877789,0.005615349],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002028519,"threshold_uncertainty_score":0.006786108,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0127652237541027,"score_gpt":0.2258152568058084,"score_spread":0.2130500330517057,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}