{"id":"W4303857056","doi":"10.3390/mi13101651","title":"Comparative Study of Gravimetric Humidity Sensor Platforms Based on CMUT and QCM","year":2022,"lang":"en","type":"article","venue":"Micromachines","topic":"Gas Sensing Nanomaterials and Sensors","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"University of Waterloo; Natural Science Foundation of Shandong Province; University of Toronto; Strong; Shandong University of Science and Technology; Shandong University","keywords":"Quartz crystal microbalance; Materials science; Gravimetric analysis; Humidity; Ultrasonic sensor; Capacitive sensing; Relative humidity; Capacitive micromachined ultrasonic transducers; Repeatability; Geophone; Linearity; Sensitivity (control systems); Acoustics; Electrical engineering; Composite material; Electronic engineering; Chemistry; Engineering; Piezoelectricity","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006410565,0.0006523955,0.0004669707,0.0005281717,0.0002168418,0.000418583,0.0007878743,0.0004753746,0.0006649709],"category_scores_gemma":[0.001168613,0.000271595,0.0002399143,0.0006042038,0.0003858206,0.0008090194,0.0004553537,0.0004218456,0.0002185338],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004585559,"about_ca_system_score_gemma":0.0002882495,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001193293,"about_ca_topic_score_gemma":0.002918889,"domain_scores_codex":[0.999301,0.00006841532,0.00003294326,0.0001484125,0.0003769463,0.00007224776],"domain_scores_gemma":[0.9994279,0.0002208051,0.000111185,0.00005153495,0.0001512266,0.00003748211],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003605029,0.00000868705,0.0001167086,0.00007256596,0.000005495516,0.00004661154,0.00002736891,0.0001452151,0.9956474,0.0001370215,0.0000319221,0.003724981],"study_design_scores_gemma":[0.000001963241,0.00010526,0.0005130621,0.000002883678,0.000009569335,0.0000844319,0.00002341488,0.003019244,0.9953636,0.00001785926,0.0008497672,0.000008838886],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9237164,0.005639737,0.06548418,0.0002287692,0.0001660919,0.000202185,0.0004699705,0.0006254342,0.003467253],"genre_scores_gemma":[0.9067899,0.003061386,0.08648934,0.0001385552,0.00005565023,0.0001507568,0.0003484707,0.00007256878,0.002893449],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001193293,"threshold_uncertainty_score":0.003390312,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01855854357249062,"score_gpt":0.2312481328177456,"score_spread":0.212689589245255,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}