{"id":"W4306248465","doi":"","title":"3D microelectronic with BEOL compatible devices","year":2015,"lang":"en","type":"article","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Microelectronics; Materials science; Computer science; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003299309,0.0006430427,0.0003503753,0.000656329,0.0005666102,0.001333249,0.0008412809,0.0008434762,0.01859419],"category_scores_gemma":[0.000403465,0.0005243152,0.0003878881,0.000346789,0.0003133959,0.0007954972,0.0008708145,0.0007997463,0.008388517],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000901982,"about_ca_system_score_gemma":0.0005615802,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001018451,"about_ca_topic_score_gemma":0.003630598,"domain_scores_codex":[0.9994932,0.000022166,0.000009427767,0.00004933996,0.0003781419,0.00004763912],"domain_scores_gemma":[0.9998686,0.000008810819,0.00001081362,0.00003718043,0.00006066857,0.00001383708],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000471395,0.0001815378,0.001211903,0.0004764243,0.00006002168,0.0008336576,0.0004276015,0.004480411,0.7665735,0.03355089,0.0811032,0.1106295],"study_design_scores_gemma":[0.00003603778,0.0002198692,0.002015998,0.00006922689,0.00002384891,0.0006948269,0.00007568911,0.007233304,0.4675324,0.002238053,0.5198065,0.00005427394],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"other","genre_gemma":"empirical","genre_scores_codex":[0.2291584,0.008901952,0.1935757,0.004281174,0.007581332,0.0008889697,0.005821658,0.01092587,0.5388649],"genre_scores_gemma":[0.4372947,0.002810093,0.1339208,0.0007896015,0.0001966303,0.0002937805,0.0043406,0.002071395,0.4182823],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.01859419,"threshold_uncertainty_score":0.06220371,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01229928398451126,"score_gpt":0.1981766899078611,"score_spread":0.1858774059233499,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}