{"id":"W4306836125","doi":"10.3390/coatings12101581","title":"Downstream Electric Field Effects during Film Deposition with a Radio Frequency Plasma and Observations of Carbon Reduction","year":2022,"lang":"en","type":"article","venue":"Coatings","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Lakehead University","funders":"","keywords":"Biasing; Plasma; Analytical Chemistry (journal); Substrate (aquarium); Materials science; Electric field; Optoelectronics; Chemistry; Voltage; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001112524,0.0003255559,0.0001644211,0.0001643795,0.0002764058,0.0002853484,0.0002855261,0.0003533079,0.001990427],"category_scores_gemma":[0.0002551533,0.0001751335,0.0001271399,0.0002029906,0.0003160621,0.0002155619,0.0001922532,0.0005379143,0.0002577566],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003549872,"about_ca_system_score_gemma":0.0001089334,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001568132,"about_ca_topic_score_gemma":0.001956622,"domain_scores_codex":[0.9998792,0.000009171429,0.000004512809,0.00003590386,0.00004312447,0.00002797412],"domain_scores_gemma":[0.999827,0.00006193406,0.00003508795,0.00001974273,0.00003978254,0.00001649998],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004355747,0.00000752596,0.0002617195,0.00002173391,0.000002590947,0.00005567851,0.00004777456,0.00003586854,0.9990595,0.0000316083,0.00003527126,0.0003971042],"study_design_scores_gemma":[0.000004888637,0.00006200565,0.004382575,0.000002773502,0.000003989347,0.00008209886,0.00004727463,0.0004260322,0.9944999,0.00001748336,0.0004675562,0.000003320454],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9959259,0.0003004964,0.0009278526,0.00007807709,0.00002375908,0.00001571737,0.0002034405,0.00006922769,0.002455586],"genre_scores_gemma":[0.9970994,0.0001601494,0.001011236,0.00003087997,0.000007533576,0.00001331999,0.0001284913,0.00002887499,0.001520182],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001990427,"threshold_uncertainty_score":0.006658673,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006466174488474277,"score_gpt":0.1940226110599565,"score_spread":0.1875564365714822,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}