{"id":"W4307081143","doi":"","title":"3D shaping of multi-layers stack using a single plasma etching step and greyscaleelectron-beam lithography","year":2022,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Lithography; Stack (abstract data type); Etching (microfabrication); Materials science; Electron-beam lithography; Plasma etching; Plasma; Resist; Stencil lithography; Maskless lithography; Optoelectronics; Reactive-ion etching; Beam (structure); Nanotechnology; Optics; Layer (electronics); Computer science; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001175087,0.000496109,0.0002893404,0.0002876664,0.000366689,0.000657534,0.0003652159,0.0006772872,0.002752536],"category_scores_gemma":[0.0001690424,0.0003938259,0.0004406342,0.0002047303,0.0002958172,0.0003023738,0.0006105248,0.0004740768,0.0005873708],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004191761,"about_ca_system_score_gemma":0.0004906107,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007554769,"about_ca_topic_score_gemma":0.001716189,"domain_scores_codex":[0.9998653,0.000006958061,0.000007089277,0.00002871702,0.00006697181,0.00002503315],"domain_scores_gemma":[0.9998515,0.00002433325,0.00002630034,0.00005737809,0.00002777228,0.00001266512],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007883337,0.00003100794,0.0003839777,0.00009983269,0.00001653436,0.000323358,0.0001577224,0.01188105,0.970859,0.001929119,0.000724673,0.01351487],"study_design_scores_gemma":[0.00001605361,0.0001164378,0.002889173,0.00001489714,0.00001788349,0.0004992003,0.00006645932,0.04759907,0.9381747,0.0008565886,0.009703233,0.00004625228],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7654215,0.0008606122,0.2027205,0.0004006054,0.0003353886,0.0001273143,0.0009162227,0.004471413,0.02474644],"genre_scores_gemma":[0.8737857,0.0002595047,0.1188989,0.00007199233,0.00001764441,0.00005239162,0.0003175953,0.0003220148,0.006274335],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002752536,"threshold_uncertainty_score":0.009208143,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02352260811731799,"score_gpt":0.2364270227817841,"score_spread":0.2129044146644661,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}