{"id":"W4308680566","doi":"10.1039/d2ra04234g","title":"Direct glass-to-glass bonding obtained <i>via</i> simplified ammonia-based low-temperature procedure resists high shear stress and powerful CW fiber laser irradiation","year":2022,"lang":"en","type":"article","venue":"RSC Advances","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Waterloo Institute for Nanotechnology, University of Waterloo; Natural Sciences and Engineering Research Council of Canada; University of Waterloo","keywords":"Materials science; Anodic bonding; Composite material; Ammonium hydroxide; Surface roughness; Hydroxide; Soda-lime glass; Chemical engineering; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.000111167,0.0002885236,0.0003008175,0.0001847943,0.0002742971,0.00007236392,0.0002262558,0.0001233042,0.0000572906],"category_scores_gemma":[0.00007810364,0.0002837203,0.00005097655,0.0005434096,0.00005185806,0.0002809871,0.00009138607,0.0003511271,0.00001682594],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001597885,"about_ca_system_score_gemma":0.00003402488,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000009698833,"about_ca_topic_score_gemma":0.00003787646,"domain_scores_codex":[0.9986015,0.00003602593,0.0002400248,0.0004111769,0.0002981285,0.000413132],"domain_scores_gemma":[0.9993902,0.0001240982,0.00006188361,0.0002921372,0.00003842905,0.00009322837],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0005797931,0.0002952512,0.009214287,0.002107193,0.000242739,0.0001984582,0.0009388496,0.894605,0.047799,0.00127269,0.02229237,0.02045441],"study_design_scores_gemma":[0.004823545,0.001055553,0.03778844,0.000695301,0.0001758669,0.00003920362,0.002159233,0.01429552,0.5504181,0.002162349,0.3829901,0.003396848],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9932901,0.002507296,0.0001262172,0.0008117241,0.0003924934,0.0004403594,0.0001905223,0.001229675,0.001011626],"genre_scores_gemma":[0.9971709,0.00007284007,0.001451944,0.0001681793,0.00008929166,0.0001448445,0.00008726891,0.00006120474,0.0007535571],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.8803095,"threshold_uncertainty_score":0.9999615,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003810137506113918,"score_gpt":0.204573495812462,"score_spread":0.2007633583063481,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}