{"id":"W4311591780","doi":"10.1109/ipc53466.2022.9975630","title":"2D Electrothermal MEMS Waveguide Positioner","year":2022,"lang":"en","type":"article","venue":"2022 IEEE Photonics Conference (IPC)","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Microelectromechanical systems; Actuator; Waveguide; Silicon photonics; Photonics; Silicon; Materials science; Chip; Optoelectronics; Lab-on-a-chip; Electronic engineering; Optics; Electrical engineering; Engineering; Microfluidics; Nanotechnology; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002852064,0.0005018284,0.0005188163,0.0002479751,0.0003097748,0.0006335485,0.001013108,0.001128376,0.002261466],"category_scores_gemma":[0.0002428329,0.0003524752,0.0002660722,0.0002540956,0.0005095631,0.0008060652,0.0006862872,0.0004861859,0.0007183275],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004626391,"about_ca_system_score_gemma":0.0002986091,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002821018,"about_ca_topic_score_gemma":0.0005694942,"domain_scores_codex":[0.9995033,0.00003356855,0.00001718242,0.0001347655,0.0002594641,0.00005170273],"domain_scores_gemma":[0.9997869,0.00003774838,0.00007288928,0.00004702156,0.00003605914,0.00001927612],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009719756,0.00003830286,0.0001653197,0.00004301203,0.000009117305,0.00008523054,0.00004253157,0.0009850751,0.9921601,0.001287626,0.0003037729,0.004782631],"study_design_scores_gemma":[0.00006897919,0.0003896594,0.00177137,0.000007133064,0.00001648721,0.0002978649,0.00002690117,0.02316958,0.9660121,0.0001956578,0.008005477,0.0000387827],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8571447,0.001509146,0.1269398,0.000579811,0.0007904203,0.0001537893,0.0004879535,0.001414938,0.01097931],"genre_scores_gemma":[0.8914315,0.0004558254,0.0955836,0.0001664495,0.0001006862,0.0001207917,0.0001437447,0.00005322999,0.01194435],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002261466,"threshold_uncertainty_score":0.00756532,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01325644812737864,"score_gpt":0.2173382905726906,"score_spread":0.204081842445312,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}