{"id":"W4311685552","doi":"10.32920/21740843.v1","title":"Direct patterning of silicon oxide on Si-substrate induced by femtosecond laser","year":2022,"lang":"en","type":"preprint","venue":"","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Toronto Metropolitan University","funders":"","keywords":"Femtosecond; Silicon; Materials science; Substrate (aquarium); Silicon oxide; Scanning electron microscope; Raman spectroscopy; Laser; Oxide; Optoelectronics; Optics; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0000437511,0.0002060412,0.0001566256,0.0000940593,0.000134593,0.0001805971,0.0002235696,0.0002132557,0.001468459],"category_scores_gemma":[0.00009581829,0.0001448382,0.0001323497,0.00009518491,0.0001691591,0.0001582884,0.0002221201,0.0002902887,0.0003762259],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001135583,"about_ca_system_score_gemma":0.0001254996,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002446999,"about_ca_topic_score_gemma":0.0006649284,"domain_scores_codex":[0.9999161,0.000004190077,0.000003388748,0.00002433348,0.0000360647,0.00001595765],"domain_scores_gemma":[0.9999474,0.00001389049,0.00001210293,0.00001062249,0.0000100828,0.000005711669],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00000810338,0.000003195815,0.00005110608,0.00003069962,0.000001588599,0.0000479229,0.0000153791,0.00003690903,0.9984516,0.00008175776,0.00005240822,0.001219362],"study_design_scores_gemma":[0.000004408563,0.00004296993,0.0008579222,0.000002289981,0.000002874274,0.0001375448,0.0000181409,0.0005835897,0.9962895,0.0000383253,0.002019804,0.000002697969],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9766431,0.001159954,0.0149618,0.0001161697,0.000142699,0.00002909222,0.0001979403,0.000162692,0.006586609],"genre_scores_gemma":[0.9656636,0.0009789089,0.02458499,0.00005181389,0.00003398437,0.00003396904,0.000243177,0.00005997038,0.008349593],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001468459,"threshold_uncertainty_score":0.004912436,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01880203057026423,"score_gpt":0.2413804854921833,"score_spread":0.2225784549219191,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}