{"id":"W4311910680","doi":"10.1149/2162-8777/aca9fb","title":"A Comparative Study of a:SiCN:H Thin Films Fabricated with Acetylene and Methane","year":2022,"lang":"en","type":"article","venue":"ECS Journal of Solid State Science and Technology","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of New Brunswick; McMaster University","funders":"","keywords":"Elastic recoil detection; Materials science; Thin film; Nanoindentation; Carbon film; Analytical Chemistry (journal); Acetylene; Plasma-enhanced chemical vapor deposition; Chemical vapor deposition; Ellipsometry; Raman spectroscopy; Composite material; Nanotechnology; Organic chemistry; Optics; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.002330621,0.0001109185,0.0004298001,0.0006573331,0.0002910405,0.00005556478,0.0005566013,0.00002056383,0.00007674168],"category_scores_gemma":[0.00008857118,0.00007744925,0.00001184137,0.001316955,0.001378124,0.0002605342,0.0004338403,0.0002150708,8.372641e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000346606,"about_ca_system_score_gemma":0.0003943523,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002922714,"about_ca_topic_score_gemma":0.00001422208,"domain_scores_codex":[0.9981483,0.0001213764,0.0003612929,0.0002512074,0.0008000978,0.0003177104],"domain_scores_gemma":[0.9987751,0.00006378817,0.0003709118,0.0001753813,0.0005136337,0.0001011707],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002128549,0.0002730691,0.0005648305,0.00001052372,0.00001672886,0.00008413546,0.001967201,0.0003017217,0.9959252,0.00008684413,0.0000605932,0.0004963133],"study_design_scores_gemma":[0.001486541,0.006431032,0.000520321,0.00001973434,0.00002275889,0.0003763037,0.01916551,0.0003367984,0.9700704,0.001286506,0.0001557184,0.0001283765],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.998913,0.0002973443,0.00002329922,0.0003537956,0.00009115694,0.0001962559,0.00002701831,0.000016457,0.00008160274],"genre_scores_gemma":[0.9993519,0.00005635192,0.0005162777,0.00001806177,0.000005678292,0.0000121127,2.080967e-7,0.000005387565,0.00003401457],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02585478,"threshold_uncertainty_score":0.5077755,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0195032124326319,"score_gpt":0.3056551310637101,"score_spread":0.2861519186310781,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}