{"id":"W4312897494","doi":"10.1109/pvsc48317.2022.9938511","title":"Direct observation of an atomic thin inversion layer at the native oxide/ n-Si interface","year":2022,"lang":"en","type":"article","venue":"2022 IEEE 49th Photovoltaics Specialists Conference (PVSC)","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Atomic layer deposition; Materials science; Inversion (geology); Optoelectronics; Layer (electronics); Oxide; Interface (matter); Thin film; Silicon; Computer science; Nanotechnology; Composite material; Geology; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005493965,0.0001803976,0.00007789383,0.0001642689,0.0001412413,0.0001770304,0.0002188946,0.0002329752,0.001000289],"category_scores_gemma":[0.0001460162,0.0001049179,0.00008257626,0.00009201942,0.0001993942,0.0002094501,0.0001701134,0.0003687181,0.0001621076],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001265921,"about_ca_system_score_gemma":0.000161492,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005898864,"about_ca_topic_score_gemma":0.001246095,"domain_scores_codex":[0.9999661,0.000001965518,0.000001651745,0.00000980198,0.00001444656,0.000005982649],"domain_scores_gemma":[0.9999362,0.00002463091,0.00001126359,0.000008169724,0.00001270019,0.000006968383],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001545897,0.000006603894,0.0004069164,0.0000271451,0.000001669277,0.00009496371,0.00002069331,0.00002774569,0.9978277,0.0001860349,0.0000396412,0.001345465],"study_design_scores_gemma":[0.000005720611,0.0000973616,0.007068638,0.000006412391,0.000007158597,0.0007420324,0.00007174025,0.001466041,0.9887919,0.0001940637,0.001544846,0.000003908178],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9809608,0.0006686974,0.01223885,0.00009808876,0.00002836987,0.00002203307,0.0003356397,0.0001338841,0.005513599],"genre_scores_gemma":[0.9885328,0.0003297778,0.009433724,0.00004706412,0.000007736291,0.00001368838,0.0001550021,0.00001265434,0.001467659],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001000289,"threshold_uncertainty_score":0.003346264,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03971748225981596,"score_gpt":0.2554484861881117,"score_spread":0.2157310039282958,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}