{"id":"W4313443195","doi":"10.1364/ol.478212","title":"Emulation of deep-ultraviolet lithography using rapid-prototyping, electron-beam lithography for silicon photonics design","year":2022,"lang":"en","type":"article","venue":"Optics Letters","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Lithography; Materials science; Extreme ultraviolet lithography; Next-generation lithography; Electron-beam lithography; X-ray lithography; Maskless lithography; Optics; Photolithography; Stencil lithography; Grating; Optoelectronics; Resist; Computational lithography; Nanotechnology; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004389993,0.0004178924,0.0001960727,0.0001680658,0.0001487104,0.0003617287,0.0004503709,0.0002536483,0.0007899315],"category_scores_gemma":[0.001055936,0.00020099,0.0002574555,0.00006295479,0.0002971171,0.0003696987,0.0003391587,0.000356253,0.0001656509],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003715115,"about_ca_system_score_gemma":0.0003874277,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003732958,"about_ca_topic_score_gemma":0.0004018415,"domain_scores_codex":[0.9997137,0.00005546971,0.000008512602,0.00002006284,0.0001792783,0.00002305353],"domain_scores_gemma":[0.9995546,0.0002126449,0.00007442509,0.00008875421,0.00005609987,0.00001339986],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001355421,0.00006872491,0.001296422,0.0001479186,0.00004238843,0.0003808777,0.0002094571,0.4684515,0.4547294,0.01553275,0.0005635892,0.05844145],"study_design_scores_gemma":[0.00001813961,0.000151524,0.0004185468,0.00001027137,0.000009724315,0.0001672605,0.0000218995,0.6814682,0.3133023,0.001776672,0.002640268,0.00001523529],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2188213,0.0001308788,0.7747746,0.00009090734,0.0000371899,0.00005398156,0.00005194827,0.0009831175,0.005056215],"genre_scores_gemma":[0.8314804,0.0001139636,0.1666112,0.00002962334,0.000007119868,0.00005450599,0.00004230656,0.0000824783,0.00157827],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.0007899315,"threshold_uncertainty_score":0.00269556,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0155419956569384,"score_gpt":0.2338844962576289,"score_spread":0.2183425006006905,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}