{"id":"W4313443195","doi":"10.1364/ol.478212","title":"Emulation of deep-ultraviolet lithography using rapid-prototyping, electron-beam lithography for silicon photonics design","year":2022,"lang":"en","type":"article","venue":"Optics Letters","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Lithography; Materials science; Extreme ultraviolet lithography; Next-generation lithography; Electron-beam lithography; X-ray lithography; Maskless lithography; Optics; Photolithography; Stencil lithography; Grating; Optoelectronics; Resist; Computational lithography; Nanotechnology; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0003641625,0.0002360561,0.0003006765,0.0002841537,0.0001857138,0.00003605468,0.0002533429,0.00007435517,0.00002987641],"category_scores_gemma":[0.00001797017,0.0002704139,0.0002492282,0.0005548525,0.00007037627,0.0001178526,0.00003438788,0.0002791968,7.524741e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008025532,"about_ca_system_score_gemma":0.00002276904,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000007889122,"about_ca_topic_score_gemma":6.98555e-7,"domain_scores_codex":[0.9985532,0.00005408668,0.0003896716,0.0002678321,0.0002588864,0.0004763899],"domain_scores_gemma":[0.9992868,0.0001901591,0.0001009737,0.0002906522,0.00004825227,0.00008312519],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0001018334,0.00007085508,0.000216261,0.0002110454,0.0001895623,0.000002773546,0.000334192,0.6140348,0.3818398,0.0008882241,0.00007797221,0.002032658],"study_design_scores_gemma":[0.0006050611,0.0002328595,0.0002678137,0.00002542869,0.0001171819,0.000006837145,0.00008231197,0.9293575,0.06434252,0.0002328116,0.004356097,0.0003736205],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7620577,0.001927331,0.2332996,0.00009090148,0.0003496957,0.001661844,0.00005562658,0.0002182952,0.0003390221],"genre_scores_gemma":[0.9154608,0.0001874238,0.08329006,0.0004773366,0.00005296813,0.0003793184,0.00005697941,0.00009295571,0.00000217275],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3174973,"threshold_uncertainty_score":0.9999748,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0155419956569384,"score_gpt":0.2338844962576289,"score_spread":0.2183425006006905,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}