{"id":"W4313592921","doi":"10.1021/acs.chemmater.2c03036","title":"Plasma-Enhanced Molecular Layer Deposition of Phosphane–Ene Polymer Films","year":2023,"lang":"en","type":"article","venue":"Chemistry of Materials","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University; Western University","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Foundation for Innovation; Western University; Ontario Ministry of Research, Innovation and Science; Solvay; Carleton University","keywords":"Quartz crystal microbalance; X-ray photoelectron spectroscopy; Siloxane; Polymer; Atomic layer deposition; Deposition (geology); Layer (electronics); Materials science; Phosphine; Scanning electron microscope; Chemical engineering; Analytical Chemistry (journal); Chemical vapor deposition; Chemistry; Nanotechnology; Organic chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.00008407118,0.0001340515,0.0002936639,0.00002244754,0.0000114941,0.00001641489,0.0001246371,0.0001102918,0.001012375],"category_scores_gemma":[0.00001441099,0.0001370128,0.00004239381,0.00009755155,0.00003103466,0.00005369449,0.00003179695,0.00002197354,0.00002879349],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000008068628,"about_ca_system_score_gemma":0.000008204385,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001916361,"about_ca_topic_score_gemma":1.056413e-7,"domain_scores_codex":[0.9992301,0.000008448706,0.0003446729,0.000126372,0.0001240208,0.0001663296],"domain_scores_gemma":[0.9996221,0.00001836911,0.00009010558,0.0001989628,0.00003243038,0.00003804152],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001987647,0.000008504242,0.00000360573,0.0009629091,0.00003596373,0.000004081303,0.00005709236,0.0003130467,0.9982623,0.000005194973,0.0002862395,0.00004121948],"study_design_scores_gemma":[0.0002317876,0.000007573275,0.00006241883,0.000109064,0.00001840859,0.000003607547,0.00004839753,0.000045945,0.9992946,0.00002523152,0.0000226079,0.0001303999],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9978609,0.0002589394,0.00001290536,0.000004306393,0.0004330168,0.00005992224,0.0001328631,0.0001726551,0.001064497],"genre_scores_gemma":[0.9994766,0.00006399003,0.0001312437,0.000006184079,0.00005909058,0.00001598991,0.0001153957,0.00003121323,0.0001002952],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001615703,"threshold_uncertainty_score":0.9999008,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009758027355909773,"score_gpt":0.2149086015683461,"score_spread":0.2051505742124363,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}