{"id":"W4313592921","doi":"10.1021/acs.chemmater.2c03036","title":"Plasma-Enhanced Molecular Layer Deposition of Phosphane–Ene Polymer Films","year":2023,"lang":"en","type":"article","venue":"Chemistry of Materials","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University; Western University","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Foundation for Innovation; Western University; Ontario Ministry of Research, Innovation and Science; Solvay; Carleton University","keywords":"Quartz crystal microbalance; X-ray photoelectron spectroscopy; Siloxane; Polymer; Atomic layer deposition; Deposition (geology); Layer (electronics); Materials science; Phosphine; Scanning electron microscope; Chemical engineering; Analytical Chemistry (journal); Chemical vapor deposition; Chemistry; Nanotechnology; Organic chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001019124,0.0003854265,0.0001956223,0.0002411369,0.0001209073,0.0001783274,0.0002768721,0.0002494967,0.001672759],"category_scores_gemma":[0.0001644371,0.0002386803,0.0001552171,0.0001816568,0.00011624,0.0002209259,0.0002243479,0.0004447088,0.0004346361],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00016589,"about_ca_system_score_gemma":0.00009827955,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001803158,"about_ca_topic_score_gemma":0.000361542,"domain_scores_codex":[0.9999293,0.000005620925,0.000004512235,0.00002174016,0.00002231699,0.00001654963],"domain_scores_gemma":[0.9999386,0.00002121104,0.00001257204,0.000008994451,0.00001024324,0.000008430406],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000007328719,0.000003492546,0.00001274156,0.00002719148,0.000001325047,0.00001589827,0.000005510793,0.00003026883,0.9992381,0.00003983904,0.00001956934,0.0005985887],"study_design_scores_gemma":[0.000003181502,0.0000416076,0.0003285033,0.00000194698,0.000002991402,0.00004199585,0.000002946682,0.0003326413,0.9982222,0.0000117198,0.001009063,0.000001207891],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9642672,0.001692776,0.02632345,0.0001065637,0.00007410586,0.0001015409,0.0007623674,0.0005037954,0.006168249],"genre_scores_gemma":[0.9704178,0.001374738,0.02332186,0.00004823582,0.00002167935,0.00007708651,0.0004764032,0.00006351548,0.004198716],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001672759,"threshold_uncertainty_score":0.005595863,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009758027355909773,"score_gpt":0.2149086015683461,"score_spread":0.2051505742124363,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}