{"id":"W4319996604","doi":"10.1116/6.0002167","title":"Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices","year":2023,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Nanowire Synthesis and Applications","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia; University of Ottawa","funders":"Natural Sciences and Engineering Research Council of Canada; Canada First Research Excellence Fund","keywords":"Indium phosphide; Materials science; Optoelectronics; Dry etching; Etching (microfabrication); Reactive-ion etching; Plasma etching; Fabrication; Semiconductor; Laser; Phosphide; Nanotechnology; Gallium arsenide; Optics; Metallurgy","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003135456,0.0003736141,0.0003096643,0.0002589318,0.0002576676,0.0002571324,0.0004028722,0.0003294811,0.0003742046],"category_scores_gemma":[0.000376049,0.0002378946,0.0003011648,0.0003147298,0.0001783388,0.000321845,0.0002591427,0.0003226118,0.0001444399],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002624464,"about_ca_system_score_gemma":0.0002455305,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004949275,"about_ca_topic_score_gemma":0.001399672,"domain_scores_codex":[0.9997279,0.00002492317,0.00001734996,0.00006611585,0.0001216465,0.00004198497],"domain_scores_gemma":[0.9998222,0.00003073224,0.00005495013,0.00002307081,0.00005794699,0.00001119094],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002331572,0.00002175608,0.0002529427,0.0002236744,0.00001269875,0.00005764783,0.00004952724,0.0001495185,0.9942935,0.00009114372,0.0001041213,0.004720113],"study_design_scores_gemma":[0.000004629691,0.0002016605,0.001695702,0.000009910954,0.00002308965,0.00008581269,0.00002715097,0.0006948732,0.9951174,0.00002187313,0.002110655,0.00000709625],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.981397,0.008826905,0.005790562,0.0001199775,0.00005852045,0.0001467351,0.0003156998,0.0001054332,0.003239113],"genre_scores_gemma":[0.9755344,0.006196383,0.0157589,0.00005592739,0.00002334544,0.00007961546,0.0002934533,0.00005952094,0.00199832],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0004949275,"threshold_uncertainty_score":0.00190413,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0127709592071737,"score_gpt":0.235513058369995,"score_spread":0.2227420991628213,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}