{"id":"W4319996604","doi":"10.1116/6.0002167","title":"Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices","year":2023,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Nanowire Synthesis and Applications","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia; University of Ottawa","funders":"Natural Sciences and Engineering Research Council of Canada; Canada First Research Excellence Fund","keywords":"Indium phosphide; Materials science; Optoelectronics; Dry etching; Etching (microfabrication); Reactive-ion etching; Plasma etching; Fabrication; Semiconductor; Laser; Phosphide; Nanotechnology; Gallium arsenide; Optics; Metallurgy","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.002404845,0.0002169448,0.0006270949,0.001092579,0.0003548999,0.0001014327,0.0003426071,0.0001931512,6.498209e-7],"category_scores_gemma":[0.0001384975,0.000169566,0.00002066735,0.001162956,0.0003907683,0.0002099152,0.0001061996,0.0002315754,2.503606e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001200827,"about_ca_system_score_gemma":0.000149856,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002215807,"about_ca_topic_score_gemma":0.00001116256,"domain_scores_codex":[0.9982538,0.00002197744,0.0007884623,0.000274274,0.0002320651,0.0004294378],"domain_scores_gemma":[0.9990121,0.00004545793,0.0003786671,0.0001579033,0.0003558613,0.00005004837],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002996982,0.00007918431,0.0000613183,0.001620412,0.00008320194,0.000001082765,0.0003284692,0.00001731782,0.9831555,0.0008042951,0.000002460529,0.01381676],"study_design_scores_gemma":[0.0009162868,0.001025457,0.00007730856,0.001058139,0.0001760329,0.00006980597,0.00271559,0.001017547,0.9902411,0.002467737,0.00004416342,0.0001908902],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9934426,0.003175533,0.002115625,0.0003449546,0.0001003543,0.0006559366,0.00000352861,0.0001585551,0.000002945161],"genre_scores_gemma":[0.9985613,0.000494977,0.0008148034,0.000006003449,0.00001410482,0.00008681189,5.875886e-7,0.00001922923,0.000002161398],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01362587,"threshold_uncertainty_score":0.6914703,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0127709592071737,"score_gpt":0.235513058369995,"score_spread":0.2227420991628213,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}