{"id":"W4320491374","doi":"10.1038/s41598-023-29580-2","title":"Self-aligned multi-layer X-ray absorption grating using large-area fabrication methods for X-ray phase-contrast imaging","year":2023,"lang":"en","type":"article","venue":"Scientific Reports","topic":"Advanced X-ray Imaging Techniques","field":"Physics and Astronomy","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada; University of Waterloo; CMC Microsystems","keywords":"Grating; Materials science; Fabrication; Photoresist; Lithography; Optics; Optoelectronics; Absorption (acoustics); X-Ray Phase-Contrast Imaging; Electroplating; Resist; Layer (electronics); Nanotechnology; Phase-contrast imaging; Phase contrast microscopy","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000180919,0.000352879,0.0001942233,0.0003624152,0.0001320606,0.0002763973,0.0004409346,0.0003931256,0.0006516637],"category_scores_gemma":[0.0001804682,0.0002843119,0.0002672753,0.0002383848,0.0002191172,0.0003413383,0.0002880904,0.0003985066,0.0004454767],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002659558,"about_ca_system_score_gemma":0.0002111064,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002711784,"about_ca_topic_score_gemma":0.0006440468,"domain_scores_codex":[0.9998139,0.00001445109,0.00001525743,0.0000487195,0.00008506163,0.00002261742],"domain_scores_gemma":[0.9997901,0.00003791851,0.0000916976,0.00003676903,0.00002837886,0.00001512567],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000006993418,0.00001284783,0.0001142694,0.000052854,0.00000383675,0.00004839445,0.00001528917,0.000188099,0.9957457,0.0002704052,0.0000976716,0.003443723],"study_design_scores_gemma":[0.000007367072,0.00009820028,0.0009636679,0.000006527885,0.000008855674,0.0002717566,0.0000101853,0.005264543,0.989992,0.00005621416,0.003311844,0.000008952376],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7329,0.006225655,0.2485846,0.0003456875,0.0003458374,0.0002866022,0.0004365557,0.001840599,0.009034428],"genre_scores_gemma":[0.7137862,0.001877588,0.280091,0.0001323399,0.0000624882,0.0001484135,0.0002076477,0.0001100765,0.003584129],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006516637,"threshold_uncertainty_score":0.00218004,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0457714538935384,"score_gpt":0.397977347632486,"score_spread":0.3522058937389476,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}