{"id":"W4322768359","doi":"10.1002/admi.202202489","title":"Graphite Pellicle: Physical Shield for Next‐Generation EUV Lithography Technology","year":2023,"lang":"en","type":"article","venue":"Advanced Materials Interfaces","topic":"Graphene research and applications","field":"Materials Science","cited_by":22,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Ottawa","funders":"Sungkyunkwan University","keywords":"Extreme ultraviolet lithography; Photomask; Materials science; Reticle; Nanotechnology; Lithography; Fabrication; Graphite; Electronics; Characterization (materials science); Resist; Optoelectronics; Composite material; Electrical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002985177,0.0001981045,0.0002792942,0.0003774357,0.0002667973,0.0001914382,0.0004368179,0.00009175063,0.0001313272],"category_scores_gemma":[0.0001096087,0.0001738831,0.000069797,0.0009575794,0.000227925,0.0003816922,0.0001357289,0.00006771871,0.0004089523],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001287263,"about_ca_system_score_gemma":0.00002081841,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001167293,"about_ca_topic_score_gemma":0.00001079819,"domain_scores_codex":[0.9984052,0.00005096216,0.00029754,0.0005100661,0.0001923719,0.0005438915],"domain_scores_gemma":[0.9991462,0.0001140969,0.0001169701,0.0004158082,0.0001236746,0.00008331138],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004897292,0.00004895937,0.00001656978,0.00003937581,0.00001001918,8.857438e-7,0.0000957366,0.00006791497,0.9809412,0.01396433,0.0007447953,0.004021231],"study_design_scores_gemma":[0.0002755772,0.0002020024,0.00004935208,0.00002625753,0.00001044131,0.000002124065,0.0002237287,0.0001397687,0.9617088,0.0323656,0.00481026,0.0001860371],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9947433,0.0001442588,0.001871819,0.001159381,0.0004865537,0.0006809548,0.000238884,0.0006080621,0.00006678492],"genre_scores_gemma":[0.9942333,0.0001976105,0.003879396,0.00004692598,0.0002332877,0.001122635,0.00009259043,0.00003376801,0.0001604514],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01923236,"threshold_uncertainty_score":0.7090749,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.05231495775623821,"score_gpt":0.3431609990312622,"score_spread":0.290846041275024,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}