{"id":"W4323042065","doi":"10.1116/5.0124150","title":"High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining","year":2023,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University; University of Ottawa","funders":"","keywords":"Materials science; Surface micromachining; Nanolithography; Optoelectronics; Resonator; Silicon nitride; Femtosecond; Laser; Etching (microfabrication); Electron-beam lithography; Photolithography; Silicon; Microfabrication; Fabrication; Nanotechnology; Laser beam machining; Resist; Optics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.002718249,0.0003656219,0.0007700188,0.0009825621,0.0006628397,0.0001823122,0.0007365139,0.000354161,0.00005259378],"category_scores_gemma":[0.000183649,0.0002961727,0.00006393105,0.001731075,0.0009027218,0.0003195608,0.0003593485,0.0007519869,0.000007023835],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001470362,"about_ca_system_score_gemma":0.00043589,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000137503,"about_ca_topic_score_gemma":0.000001968331,"domain_scores_codex":[0.9968266,0.00008902419,0.0009698448,0.0006276065,0.0005122583,0.0009746156],"domain_scores_gemma":[0.9983273,0.00006624602,0.0007461138,0.0002544732,0.0004077534,0.0001981293],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000942304,0.00009452652,0.0003979568,0.00004671916,0.00005404842,0.000003539298,0.00005141244,4.015892e-7,0.9333276,0.01774071,0.00003383529,0.048155],"study_design_scores_gemma":[0.001009473,0.0004147236,0.0001442777,0.0001004077,0.00004943007,0.0000240097,0.000301742,0.00002792859,0.9319319,0.06446687,0.001205852,0.0003233847],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9934781,0.002216522,0.001717655,0.00197612,0.0002149449,0.0002045455,0.00003199615,0.0001452458,0.00001493411],"genre_scores_gemma":[0.9990468,0.0002440375,0.0004906657,0.00006776113,0.00006486288,0.00001597143,0.000004765987,0.00002667065,0.00003845612],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04783162,"threshold_uncertainty_score":0.999949,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01649678396470169,"score_gpt":0.2594472842183119,"score_spread":0.2429505002536102,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}