{"id":"W4327553838","doi":"10.1002/adem.202201707","title":"Focussed Helium Ion Beam Exposure of Polymethylmethacrylate: Positive or Negative Tone Images, Polyenes, and Fluorescent Carbon Layers","year":2023,"lang":"en","type":"article","venue":"Advanced Engineering Materials","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Government of Canada; University of Ottawa","funders":"Ontario Ministry of Research and Innovation; Natural Sciences and Engineering Research Council of Canada; Ministère de la Défense Nationale; CMC Microsystems","keywords":"Materials science; Ion beam lithography; Nanolithography; Fluorescence; Raman scattering; Helium; Polymer; Carbon fibers; Nanotechnology; Raman spectroscopy; Ion beam; Dissolution; Lithography; Ion; Optoelectronics; Beam (structure); Optics; Chemical engineering; Resist; Composite number; Fabrication; Organic chemistry; Composite material; Chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001256295,0.0002243883,0.00008012835,0.0002326245,0.0001561806,0.0001686589,0.0001894316,0.0002413605,0.00369037],"category_scores_gemma":[0.0001250021,0.0001730801,0.000105022,0.0001919421,0.0002735656,0.000204749,0.0001807994,0.0003266671,0.0002252094],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00030717,"about_ca_system_score_gemma":0.0001674264,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001515551,"about_ca_topic_score_gemma":0.003002685,"domain_scores_codex":[0.9999334,0.000007185121,0.000003452888,0.00001628512,0.00001791723,0.00002185116],"domain_scores_gemma":[0.9998517,0.00005953851,0.00002851925,0.00001919332,0.00002276854,0.00001826629],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007596389,0.000007715186,0.0001110192,0.00002192235,0.000002139975,0.00007037944,0.00004702718,0.00002645456,0.9988771,0.00007701428,0.00004128557,0.0006419299],"study_design_scores_gemma":[0.00001023408,0.00007000282,0.005003917,0.000006884715,0.000005168436,0.0001578301,0.00004353714,0.0004213486,0.9932336,0.00003574116,0.001008049,0.000003717055],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9918542,0.0007832063,0.002775339,0.0001096229,0.00003390032,0.00002964105,0.0002142918,0.00006178404,0.00413795],"genre_scores_gemma":[0.9871459,0.0007427348,0.006337511,0.00008234204,0.00001395806,0.00003314382,0.0002544298,0.00005160554,0.005338302],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00369037,"threshold_uncertainty_score":0.01234549,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004796784430893551,"score_gpt":0.2262540512266396,"score_spread":0.2214572667957461,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}