{"id":"W4327697688","doi":"10.1117/12.2659145","title":"Liquid metal fabrication of ultrathin Ga2O3 and GaN layers for integrated optics","year":2023,"lang":"en","type":"article","venue":"","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"RMIT University; European Commission; Ontario Ministry of Natural Resources and Forestry","keywords":"Materials science; Fabrication; Ellipsometry; X-ray photoelectron spectroscopy; Photonics; Optoelectronics; Nitride; Metal; Oxide; Semiconductor; Plasma; Nanotechnology; Thin film; Chemical engineering; Layer (electronics); Metallurgy","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001038999,0.0003206273,0.0002844358,0.0001839364,0.0001593196,0.00032092,0.0005357144,0.0003419581,0.0008052944],"category_scores_gemma":[0.0001278675,0.0002461634,0.0002264527,0.000189466,0.0002114938,0.0003698617,0.000420661,0.0004419503,0.0004338287],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004411756,"about_ca_system_score_gemma":0.0002163226,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006616984,"about_ca_topic_score_gemma":0.001857569,"domain_scores_codex":[0.9998727,0.000007908492,0.000005471296,0.00003066107,0.00005821613,0.00002511258],"domain_scores_gemma":[0.9999433,0.000009961258,0.00002197124,0.00001052357,0.00000745482,0.000006789815],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001597889,0.00001008257,0.0000728943,0.00004632948,0.000005192253,0.00005091561,0.00001280847,0.0003000214,0.9956889,0.0005145075,0.00009842369,0.003183878],"study_design_scores_gemma":[0.0000116701,0.00006667582,0.0006151607,0.000005423573,0.000007810079,0.0001388751,0.000009939126,0.003875194,0.9914539,0.0001579895,0.003648473,0.000008870022],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8861044,0.004506253,0.0931405,0.0003091451,0.0002855727,0.0001299099,0.000633607,0.0008337681,0.01405681],"genre_scores_gemma":[0.9007089,0.001174939,0.09432409,0.0001537723,0.00003434921,0.00008324015,0.0002901546,0.00011461,0.003115944],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008052944,"threshold_uncertainty_score":0.003201008,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02232934386706878,"score_gpt":0.2696951720639338,"score_spread":0.2473658281968651,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}