{"id":"W4327697688","doi":"10.1117/12.2659145","title":"Liquid metal fabrication of ultrathin Ga2O3 and GaN layers for integrated optics","year":2023,"lang":"en","type":"article","venue":"","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"RMIT University; European Commission; Ontario Ministry of Natural Resources and Forestry","keywords":"Materials science; Fabrication; Ellipsometry; X-ray photoelectron spectroscopy; Photonics; Optoelectronics; Nitride; Metal; Oxide; Semiconductor; Plasma; Nanotechnology; Thin film; Chemical engineering; Layer (electronics); Metallurgy","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000130977,0.00007568047,0.0001402535,0.00004252026,0.00002944927,0.00002065561,0.00005372223,0.00002255292,0.0001379019],"category_scores_gemma":[0.000008856479,0.00006040173,0.00004253094,0.0001107566,0.00002172668,0.0000636109,0.000009278962,0.00002457372,0.000008217894],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000003156732,"about_ca_system_score_gemma":0.00002367719,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001917496,"about_ca_topic_score_gemma":0.000003440367,"domain_scores_codex":[0.999547,0.00001339692,0.0001668574,0.0001161925,0.00004536914,0.0001111895],"domain_scores_gemma":[0.9996628,0.00005508036,0.00007107414,0.00009106562,0.0000852588,0.00003468403],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002869549,0.00002568786,0.0005416674,0.00003437296,0.00005429762,7.738985e-8,0.000223152,0.00003260019,0.9763466,0.02124022,0.0008199989,0.0006526614],"study_design_scores_gemma":[0.00039104,0.000149492,0.000327581,0.00001360255,0.00004933924,1.216988e-7,0.00194153,0.00138983,0.992043,0.001395795,0.002177956,0.0001206703],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9959756,0.000007557586,0.002278807,0.00007773146,0.0001306121,0.0001903183,0.0001222662,0.00003623051,0.001180885],"genre_scores_gemma":[0.9983388,0.000003699,0.0007454562,0.00002208778,0.00006882111,0.00002299099,0.0002202794,0.00001029101,0.0005675975],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01984442,"threshold_uncertainty_score":0.2463111,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02232934386706878,"score_gpt":0.2696951720639338,"score_spread":0.2473658281968651,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}