{"id":"W4327706641","doi":"10.1116/6.0002339","title":"Plasma induced damage on AlGaN/GaN heterostructure during gate opening for power devices","year":2023,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":14,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"Centre National de la Recherche Scientifique; Institut National des Sciences Appliquées de Lyon; Fonds de recherche du Québec – Nature et technologies; Université Grenoble Alpes; Université de Sherbrooke; Indian National Science Academy","keywords":"Materials science; Heterojunction; Optoelectronics; X-ray photoelectron spectroscopy; Etching (microfabrication); Barrier layer; Reactive-ion etching; Plasma; Wide-bandgap semiconductor; Transmission electron microscopy; Analytical Chemistry (journal); Layer (electronics); Nanotechnology; Chemistry; Chemical engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008139652,0.0001533535,0.0001028641,0.00008743494,0.0001781,0.000175551,0.0002106965,0.0002331792,0.0006382497],"category_scores_gemma":[0.0001520665,0.0001102323,0.0001197623,0.00008526816,0.0001355778,0.0002140418,0.0001397172,0.0001973411,0.0001020639],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002290136,"about_ca_system_score_gemma":0.000110241,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005628524,"about_ca_topic_score_gemma":0.0008532596,"domain_scores_codex":[0.9999288,0.000005212742,0.000002932822,0.00001398288,0.00002928868,0.00001961128],"domain_scores_gemma":[0.9999334,0.000016576,0.00002082489,0.00001011118,0.00001367426,0.000005394339],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002900195,0.000007001845,0.0004045143,0.00002960633,0.000002981258,0.00008764097,0.00004470448,0.0001476972,0.9976819,0.00003045341,0.00002466253,0.001509953],"study_design_scores_gemma":[0.000003433198,0.0001245584,0.006797995,0.00000280673,0.000005362373,0.0001619558,0.00004228619,0.001259588,0.9910988,0.00003178896,0.0004685746,0.000002843128],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9976473,0.0003497387,0.001382185,0.00002802718,0.00000938739,0.000008928214,0.00004776767,0.00003427898,0.0004922454],"genre_scores_gemma":[0.9983791,0.0001569419,0.0009868331,0.00001364184,0.000002601273,0.000005796848,0.00003617151,0.000008168094,0.000410605],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006382497,"threshold_uncertainty_score":0.002135158,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01524008716638849,"score_gpt":0.2733346413698464,"score_spread":0.2580945542034579,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}