{"id":"W4353070344","doi":"10.3390/mi14030700","title":"Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators","year":2023,"lang":"en","type":"article","venue":"Micromachines","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure","funders":"PRIMA Québec; Natural Sciences and Engineering Research Council of Canada","keywords":"Actuator; Microelectromechanical systems; Materials science; Capacitance; Capacitive sensing; Displacement (psychology); Voltage; Piezoelectricity; Optoelectronics; Acoustics; Electrical engineering; Electrode; Engineering; Physics; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009917219,0.0001470732,0.0002125033,0.0001517152,0.00003311537,0.00001509871,0.0001815273,0.00006875989,0.00007696142],"category_scores_gemma":[0.00003292279,0.0001266764,0.00006695382,0.0004388418,0.00002868046,0.00005792637,0.0000295923,0.0001245621,0.0005091632],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001796975,"about_ca_system_score_gemma":0.0000113447,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004547423,"about_ca_topic_score_gemma":0.00003921294,"domain_scores_codex":[0.9992705,0.000008364804,0.0001993617,0.0001289163,0.0001097993,0.0002830504],"domain_scores_gemma":[0.9996241,0.0001058677,0.0000217059,0.0001654544,0.00001628138,0.00006657738],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003027213,0.00006892376,0.004936407,0.0005227224,0.0003316509,0.00009359478,0.001175757,0.001203512,0.8781595,0.0007321774,0.02360173,0.08914375],"study_design_scores_gemma":[0.001515903,0.000204356,0.02134206,0.0001512456,0.0001793167,0.00004080823,0.0001901689,0.2073562,0.6453931,0.003133481,0.1190107,0.001482628],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9898214,0.0006439313,0.0004462739,0.00004157053,0.0006101159,0.00008992158,0.00003188089,0.0005709909,0.007743861],"genre_scores_gemma":[0.9989545,0.0002065614,0.0001832893,0.00002812509,0.00008270558,0.000007953718,0.00004273183,0.00003217405,0.0004619505],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2327664,"threshold_uncertainty_score":0.6544433,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009924775639524392,"score_gpt":0.2269534061137031,"score_spread":0.2170286304741787,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}