{"id":"W4353070344","doi":"10.3390/mi14030700","title":"Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators","year":2023,"lang":"en","type":"article","venue":"Micromachines","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure","funders":"PRIMA Québec; Natural Sciences and Engineering Research Council of Canada","keywords":"Actuator; Microelectromechanical systems; Materials science; Capacitance; Capacitive sensing; Displacement (psychology); Voltage; Piezoelectricity; Optoelectronics; Acoustics; Electrical engineering; Electrode; Engineering; Physics; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001285815,0.0003585971,0.0001941247,0.0001385718,0.0001552234,0.000227684,0.0005547638,0.0002746211,0.0006415903],"category_scores_gemma":[0.0002488158,0.0002468617,0.0001810158,0.0001151661,0.0001283762,0.0003085163,0.0002619942,0.0002924421,0.0003236959],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002996212,"about_ca_system_score_gemma":0.0002381745,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008590594,"about_ca_topic_score_gemma":0.002278393,"domain_scores_codex":[0.9997969,0.000009904144,0.000009724676,0.00004807973,0.0001151345,0.0000202306],"domain_scores_gemma":[0.9998242,0.00003507109,0.00005505557,0.00001716131,0.0000578742,0.00001060287],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001483518,0.000006290926,0.000171139,0.00005414872,0.000002879941,0.0000474542,0.00001537242,0.0002586851,0.9962422,0.00009363353,0.00009683047,0.002996586],"study_design_scores_gemma":[0.000006651644,0.0001016225,0.001619774,0.000006940006,0.000009374507,0.000129435,0.00002455232,0.005777804,0.9890023,0.00004576073,0.003268158,0.00000757957],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9390481,0.001803008,0.04760759,0.0002988176,0.0002448533,0.00008298805,0.000414372,0.0004038385,0.01009636],"genre_scores_gemma":[0.9612762,0.001192853,0.02998934,0.0001197286,0.00003651244,0.00005815506,0.0001933146,0.00002626516,0.007107622],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008590594,"threshold_uncertainty_score":0.002173901,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009924775639524392,"score_gpt":0.2269534061137031,"score_spread":0.2170286304741787,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}