{"id":"W4366378767","doi":"10.1109/jmems.2023.3264692","title":"Lamé Resonator Integrated With Chevron-Shaped Thermal Actuators to Improve Motional Resistance and Temperature Stability","year":2023,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Actuator; Resonator; Transducer; Capacitive sensing; Materials science; Chevron (anatomy); Thermal stability; Voltage; Thermal; Temperature measurement; Electrical engineering; Acoustics; Mechanical engineering; Optoelectronics; Physics; Engineering; Thermodynamics","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004188348,0.0006655694,0.0006903487,0.0002835009,0.0002724379,0.0006024494,0.00135963,0.0009556804,0.001386651],"category_scores_gemma":[0.0007495832,0.0004319954,0.0004409472,0.0002569099,0.0003338617,0.001101896,0.000512014,0.0006119813,0.0008457478],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004643153,"about_ca_system_score_gemma":0.0002278812,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004197715,"about_ca_topic_score_gemma":0.0009402345,"domain_scores_codex":[0.9993922,0.00005862697,0.00002940851,0.0002488164,0.0001964109,0.00007447774],"domain_scores_gemma":[0.9994296,0.00018177,0.0001274028,0.00008731572,0.0001298936,0.00004406383],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003964634,0.00001056334,0.00007450893,0.00003582417,0.000007451443,0.00004330598,0.00002498208,0.0001786642,0.9964714,0.0002000534,0.0001366437,0.002776857],"study_design_scores_gemma":[0.00002511733,0.0002801221,0.0009500444,0.000005275966,0.00002552723,0.0002759098,0.00002209311,0.01545895,0.9779413,0.00006218318,0.00491277,0.00004070985],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7717685,0.003573475,0.2149646,0.000480033,0.0005497638,0.000123514,0.0002813865,0.001998583,0.006260094],"genre_scores_gemma":[0.8300072,0.0006467773,0.1621588,0.0001964258,0.0001594212,0.00009206153,0.0001695066,0.0001982277,0.006371537],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001386651,"threshold_uncertainty_score":0.004638791,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005783269329297322,"score_gpt":0.1943878757792905,"score_spread":0.1886046064499931,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}