{"id":"W4376272235","doi":"10.1111/ijac.14431","title":"High aspect ratio sapphire micromachining by ultraviolet laser‐induced plasma‐assisted ablation (LIPAA)","year":2023,"lang":"en","type":"article","venue":"International Journal of Applied Ceramic Technology","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure","funders":"Natural Sciences and Engineering Research Council of Canada; Mitacs","keywords":"Materials science; Sapphire; Ablation; Laser ablation; Laser; Ultraviolet; Optoelectronics; Surface micromachining; Etching (microfabrication); Plasma; X-ray laser; Optics; Surface roughness; Surface finish; Fabrication; Laser power scaling; Nanotechnology; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002405118,0.0002244427,0.0003109669,0.0008589019,0.00006115571,0.0001078021,0.0007384775,0.0003097786,0.00004160034],"category_scores_gemma":[0.00004434623,0.0002276536,0.0000642359,0.0004553363,0.00006770436,0.0001876487,0.00007783473,0.0005021128,0.00005517809],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002775581,"about_ca_system_score_gemma":0.000048304,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000090212,"about_ca_topic_score_gemma":0.000003925097,"domain_scores_codex":[0.9985248,0.00001294349,0.0006480127,0.00019288,0.0003578715,0.0002635276],"domain_scores_gemma":[0.9992383,0.00005634336,0.0003047863,0.000170619,0.0001814534,0.00004850783],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007132994,0.00002835663,0.00004187612,0.00001461302,0.0001819518,0.00005519814,0.00007741337,0.001771749,0.9530305,0.002416144,0.004370759,0.03794012],"study_design_scores_gemma":[0.001044396,0.00008017135,0.000375182,0.00009548369,0.00003063068,0.0002306913,0.0001093802,0.005411073,0.9732858,0.01670255,0.002351597,0.0002830601],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9920421,0.00002153446,0.003267837,0.001010532,0.001229857,0.0001253014,0.00005019857,0.00158265,0.0006699477],"genre_scores_gemma":[0.9967535,0.00006654106,0.002654642,0.00005598342,0.0002540942,0.000017938,0.000107185,0.00006234224,0.00002783849],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03765706,"threshold_uncertainty_score":0.9283446,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007572697167645512,"score_gpt":0.2349942004501716,"score_spread":0.2274215032825261,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}