{"id":"W4377288994","doi":"10.3390/mi14051089","title":"Lateral Extensional Mode Piezoelectric ZnO-on-Nickel RF MEMS Resonators for Back-End-of-Line Integration","year":2023,"lang":"en","type":"article","venue":"Micromachines","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Division of Electrical, Communications and Cyber Systems; King Abdulaziz City for Science and Technology; National Science Foundation","keywords":"Resonator; Materials science; Microelectromechanical systems; Electroplating; Fabrication; Piezoelectricity; Optoelectronics; Joule heating; Q factor; CMOS; Electrical engineering; Composite material; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0000742213,0.0001866159,0.000221341,0.0002775782,0.00005476207,0.0000112247,0.0001497723,0.0001163029,0.00001567989],"category_scores_gemma":[0.00007227229,0.0001528655,0.00009194833,0.0004078006,0.00004104098,0.00008919866,0.00003308758,0.0001585925,0.00005103137],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003488898,"about_ca_system_score_gemma":0.00001054221,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002408016,"about_ca_topic_score_gemma":0.0000478477,"domain_scores_codex":[0.999207,0.000002480827,0.0002387872,0.0001954163,0.00009939605,0.000256949],"domain_scores_gemma":[0.9995737,0.0001167256,0.00003843194,0.0001953533,0.00004710894,0.00002864832],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004116851,0.00002163829,0.00003664972,0.00005192572,0.00002535082,0.000003116511,0.00006152967,0.007384082,0.9332319,0.0007378923,0.006820827,0.05158385],"study_design_scores_gemma":[0.0008700308,0.0002685443,0.001068307,0.0001231525,0.00001878806,0.00001220809,0.00004443633,0.1166858,0.8490304,0.01796151,0.01348516,0.000431678],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9927003,0.0005136742,0.00504489,0.0001818776,0.000382171,0.0002130905,0.00009927779,0.0007227125,0.0001419433],"genre_scores_gemma":[0.9933096,0.0003361736,0.0051295,0.0000355239,0.00009798831,0.00003827726,0.0001547485,0.00005583986,0.0008423571],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1093017,"threshold_uncertainty_score":0.6233672,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01873243453263725,"score_gpt":0.2775522758440959,"score_spread":0.2588198413114586,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}