{"id":"W4378174268","doi":"10.1088/1361-6439/acd8c3","title":"Fabrication of low-cost MEMS microfluidic devices using metal embossing technique on glass for lab-on-chip applications","year":2023,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"Microsemi (Canada)","funders":"","keywords":"Embossing; Fabrication; Materials science; Microelectromechanical systems; Wafer; Microfluidics; Layer (electronics); Substrate (aquarium); Manufacturing cost; Plating (geology); Chip; Nanotechnology; Mechanical engineering; Composite material; Engineering; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001966223,0.0003720852,0.0003344361,0.0002839188,0.0002973631,0.0003819051,0.0005684515,0.0004168985,0.001188847],"category_scores_gemma":[0.0002202138,0.0002405491,0.0003285019,0.0001630463,0.0002064416,0.0002778937,0.0002960243,0.0003437965,0.0007461431],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003308708,"about_ca_system_score_gemma":0.0002928776,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003638734,"about_ca_topic_score_gemma":0.001134251,"domain_scores_codex":[0.9997969,0.0000154417,0.00001664698,0.00004136309,0.0001033868,0.00002621437],"domain_scores_gemma":[0.9998864,0.00002901079,0.00002826248,0.00002336477,0.00002119938,0.00001170285],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000109831,0.00001136315,0.00007688827,0.00008222472,0.000006035447,0.00005222256,0.00001241573,0.0001272397,0.9938799,0.0003582834,0.0001816239,0.005200738],"study_design_scores_gemma":[0.00001020775,0.0001819787,0.001370526,0.000009656761,0.00001716445,0.0001778013,0.00001527584,0.001775499,0.989258,0.0001146674,0.007053189,0.00001600586],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.680949,0.009556012,0.2863056,0.001222117,0.001138615,0.0009143973,0.001284173,0.002758844,0.01587119],"genre_scores_gemma":[0.6953436,0.002411843,0.2951252,0.0001900761,0.0001352917,0.0003269464,0.000390631,0.00006322148,0.006013182],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001188847,"threshold_uncertainty_score":0.00397706,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01603013870902692,"score_gpt":0.251838708281829,"score_spread":0.2358085695728021,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}