{"id":"W4378802132","doi":"10.1117/12.2666094","title":"Recent progress in subwavelength grating metamaterial engineered silicon photonic devices","year":2023,"lang":"en","type":"article","venue":"","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada","funders":"","keywords":"Materials science; Metamaterial; Lithography; Silicon on insulator; Optics; Grating; Photonics; Optoelectronics; Electron-beam lithography; Photolithography; Wavelength; Collimated light; Silicon; Resist; Physics; Nanotechnology; Laser","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0009096521,0.00032875,0.0002861423,0.0004437693,0.0001131174,0.0008472246,0.0004073434,0.0005459863,0.001852007],"category_scores_gemma":[0.0005216122,0.0002110387,0.0001921663,0.0005319491,0.0003835144,0.001382833,0.0005841915,0.0005257943,0.000633184],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003268512,"about_ca_system_score_gemma":0.0003265945,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00009561921,"about_ca_topic_score_gemma":0.0001939471,"domain_scores_codex":[0.9997931,0.00002450173,0.00002175267,0.00005776796,0.00006861051,0.00003414586],"domain_scores_gemma":[0.9995338,0.0002051591,0.00008832814,0.00003836267,0.00008978998,0.00004462141],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002719832,0.0002031914,0.001721424,0.004240371,0.00006190122,0.0002417659,0.0003363647,0.003605488,0.5346729,0.02876112,0.003705579,0.4221779],"study_design_scores_gemma":[0.00004388393,0.0009715665,0.003720392,0.0003747105,0.0001156325,0.001151455,0.0003441765,0.01196329,0.5909077,0.008411463,0.3819358,0.00005998176],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"review","genre_gemma":"empirical","genre_scores_codex":[0.3182514,0.5561026,0.07346088,0.006550652,0.001052594,0.0000714763,0.0003916771,0.0008435073,0.04327521],"genre_scores_gemma":[0.5779927,0.2969708,0.1086204,0.00185302,0.001136799,0.00008684967,0.00073724,0.0001603515,0.01244175],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001852007,"threshold_uncertainty_score":0.006195605,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0148390538143657,"score_gpt":0.2395659496860958,"score_spread":0.2247268958717301,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}