{"id":"W4384340581","doi":"10.1002/adfm.202305733","title":"3D HfO<sub>2</sub> Thin Film MEMS Capacitor with Superior Energy Storage Properties","year":2023,"lang":"en","type":"article","venue":"Advanced Functional Materials","topic":"Ferroelectric and Piezoelectric Materials","field":"Materials Science","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"Fundamental Research Funds for the Central Universities; Natural Sciences and Engineering Research Council of Canada; National Natural Science Foundation of China","keywords":"Capacitor; Materials science; Microelectronics; Microelectromechanical systems; Energy storage; Optoelectronics; Film capacitor; Dielectric; Electrical engineering; Voltage; Power (physics); Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow","insufficient_payload"],"consensus_categories":["insufficient_payload"],"category_scores_codex":[0.000631494,0.0005242571,0.0007033357,0.0002637048,0.0004797097,0.0003040083,0.0003429298,0.0002013065,0.00256227],"category_scores_gemma":[0.0002001584,0.0003921332,0.00007509851,0.00070582,0.0002016753,0.0007352148,0.0001136093,0.0001091388,0.001438118],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000154896,"about_ca_system_score_gemma":0.0002500578,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001490604,"about_ca_topic_score_gemma":0.00002411128,"domain_scores_codex":[0.9964457,0.0002481549,0.0007020482,0.0008453098,0.0007959768,0.0009628554],"domain_scores_gemma":[0.9986006,0.0001726455,0.0002840951,0.0005018847,0.0002505438,0.0001902577],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.001284782,0.0000535513,0.00000934177,0.00009143145,0.00003696502,0.0000415612,0.0001481157,0.002972498,0.9902281,0.0007059108,0.003343682,0.00108411],"study_design_scores_gemma":[0.0008263322,0.0004375282,0.0002885042,0.00007994578,0.0000385291,0.00007778997,0.0001066619,0.0002513385,0.9917665,0.0004775033,0.005069168,0.000580204],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.991261,0.0001888277,0.002248878,0.000175271,0.004303403,0.000428517,0.000277813,0.0008747362,0.0002415664],"genre_scores_gemma":[0.9954279,0.0001683688,0.0004180157,0.0003702543,0.001053753,0.0006206649,0.0002417829,0.0001090811,0.00159017],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004166922,"threshold_uncertainty_score":0.9998531,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01425170511113325,"score_gpt":0.1945502514665143,"score_spread":0.180298546355381,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}