{"id":"W4384340581","doi":"10.1002/adfm.202305733","title":"3D HfO<sub>2</sub> Thin Film MEMS Capacitor with Superior Energy Storage Properties","year":2023,"lang":"en","type":"article","venue":"Advanced Functional Materials","topic":"Ferroelectric and Piezoelectric Materials","field":"Materials Science","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"Fundamental Research Funds for the Central Universities; Natural Sciences and Engineering Research Council of Canada; National Natural Science Foundation of China","keywords":"Capacitor; Materials science; Microelectronics; Microelectromechanical systems; Energy storage; Optoelectronics; Film capacitor; Dielectric; Electrical engineering; Voltage; Power (physics); Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006499828,0.0002586882,0.0002999445,0.0001844378,0.0002989415,0.000361638,0.0002951372,0.0005778995,0.001096444],"category_scores_gemma":[0.0001184154,0.0001887739,0.0002682191,0.0001833148,0.0002122232,0.0002512105,0.000137514,0.0001896664,0.0002308494],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000293583,"about_ca_system_score_gemma":0.0003175724,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009832456,"about_ca_topic_score_gemma":0.002034987,"domain_scores_codex":[0.9999446,0.000001850949,0.000002309031,0.00001197564,0.00002626103,0.00001306604],"domain_scores_gemma":[0.9999344,0.000009091893,0.00001780288,0.000006056778,0.00002063373,0.00001208326],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001523163,0.000005622927,0.00008996443,0.00003284988,0.000008210207,0.00009468532,0.0000047453,0.0002480863,0.9981099,0.00006420455,0.0002047227,0.001121636],"study_design_scores_gemma":[0.00003617113,0.0001408527,0.003211525,0.000005576034,0.00003966579,0.000451205,0.00002225225,0.00629067,0.9864775,0.00005515564,0.00324458,0.00002486624],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9879474,0.0007275109,0.006968414,0.0002337574,0.0001632594,0.00002446745,0.0004762568,0.0002605972,0.0031983],"genre_scores_gemma":[0.9811558,0.0003881408,0.01620315,0.0001301298,0.0000302194,0.00002998446,0.0002463766,0.00003245084,0.001783851],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001096444,"threshold_uncertainty_score":0.00366801,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01425170511113325,"score_gpt":0.1945502514665143,"score_spread":0.180298546355381,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}