{"id":"W4385337883","doi":"10.1109/ims37964.2023.10187908","title":"Silicon-Micromachined Liquid Crystal Variable Capacitors for Tunable RF Devices","year":2023,"lang":"en","type":"article","venue":"","topic":"Advanced Antenna and Metasurface Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Capacitor; Capacitance; Microfabrication; Variable capacitor; Optoelectronics; Surface micromachining; Dielectric; Biasing; Silicon; Q factor; Chip; Liquid crystal; Fabrication; Voltage; Electrical engineering; Electrode; Engineering; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001116206,0.0001605314,0.0001959322,0.0001133094,0.00008753929,0.000024359,0.0001777459,0.0001010509,0.0000511539],"category_scores_gemma":[0.00008448734,0.0001401534,0.00005851218,0.0003716352,0.00003352118,0.0001849458,0.0000410047,0.00009421256,0.000078743],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002975848,"about_ca_system_score_gemma":0.00001177587,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002171663,"about_ca_topic_score_gemma":0.0000256318,"domain_scores_codex":[0.9991697,0.000003396051,0.0001657916,0.0001753227,0.00006970688,0.0004160919],"domain_scores_gemma":[0.9995963,0.00009810254,0.00001784141,0.0002096231,0.00003263469,0.00004548732],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001689187,0.000008893209,0.00006582599,0.0001503559,0.00005483489,0.000002756679,0.00007996952,0.02357623,0.9652405,0.00329594,0.006919235,0.0005885595],"study_design_scores_gemma":[0.0008821427,0.0002616007,0.0001576911,0.00006190303,0.00004634862,0.000008396214,0.002451319,0.08902053,0.6884977,0.006316375,0.2115286,0.000767435],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9387529,0.000350089,0.04771785,0.0001209422,0.0006621268,0.0003283285,0.00005513632,0.007194071,0.00481855],"genre_scores_gemma":[0.9822815,0.00007993387,0.0146732,0.00004049742,0.00005860754,0.00009224577,0.00002861314,0.00005338811,0.002692007],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2767428,"threshold_uncertainty_score":0.5715292,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01449485302868543,"score_gpt":0.2352149769063101,"score_spread":0.2207201238776246,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}