{"id":"W4385357797","doi":"10.1364/cleo_si.2023.sf3k.3","title":"All-dielectric, visible wavelength focusing metalens with planar surface for mechanical robustness","year":2023,"lang":"en","type":"article","venue":"","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Nanopillar; Materials science; Lithography; Electron-beam lithography; Planar; Wavelength; Optics; Optoelectronics; Dielectric; Ultraviolet; Visible spectrum; Photolithography; Photomask; Next-generation lithography; Robustness (evolution); Resist; Nanotechnology; Nanostructure; Physics; Computer science; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001258173,0.0004034181,0.0001563157,0.0001301653,0.0001818787,0.0004783508,0.000503697,0.0004090103,0.0009242781],"category_scores_gemma":[0.0001633651,0.0002562907,0.0001598415,0.00008924417,0.0003583601,0.0003862044,0.0004035862,0.0004232857,0.0005101682],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002745518,"about_ca_system_score_gemma":0.0001630003,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00043356,"about_ca_topic_score_gemma":0.000965773,"domain_scores_codex":[0.9998614,0.00000498947,0.000004967075,0.000027439,0.00007656156,0.00002463649],"domain_scores_gemma":[0.9998845,0.00002069041,0.00003688478,0.00001998499,0.00002197104,0.0000161161],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001836862,0.000004555098,0.00006503683,0.00002512125,0.00000311011,0.00004804418,0.00001557801,0.0001586165,0.997817,0.0004041947,0.00006469208,0.001375713],"study_design_scores_gemma":[0.000004809862,0.00008164326,0.0006526756,0.000002837789,0.000005143632,0.0001634273,0.00001717591,0.001722797,0.9936844,0.000121354,0.003536342,0.000007471268],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9126428,0.001181954,0.07315265,0.0002982036,0.0001479008,0.00005823293,0.0002700682,0.000855162,0.01139306],"genre_scores_gemma":[0.9488218,0.0004016466,0.04574005,0.0001515928,0.00002994928,0.00002349341,0.0001388672,0.00007663126,0.004615952],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009242781,"threshold_uncertainty_score":0.003092051,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03308040185587385,"score_gpt":0.2745868084811701,"score_spread":0.2415064066252963,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}