{"id":"W4385624843","doi":"10.1109/newcas57931.2023.10198138","title":"Toward 2.5D Structures for Multi-Channel MEMS Acoustic-Based Digital Isolators using Through Silicon Openings","year":2023,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure","funders":"","keywords":"Isolator; Microelectromechanical systems; Acoustics; Transmitter; Stack (abstract data type); Stacking; Conical surface; Channel (broadcasting); Materials science; Process (computing); Silicon; Transmission (telecommunications); Electronic engineering; Electrical engineering; Computer science; Optoelectronics; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002422409,0.0004242723,0.0002594433,0.0003655048,0.0002218177,0.0007630046,0.0007380641,0.000810782,0.00103843],"category_scores_gemma":[0.0003186855,0.0003781576,0.0003412685,0.0001589546,0.0003802313,0.0005556507,0.0005726295,0.0006314679,0.0006930075],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005119331,"about_ca_system_score_gemma":0.0004812372,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003331848,"about_ca_topic_score_gemma":0.0008937952,"domain_scores_codex":[0.9997793,0.00001538807,0.0000105841,0.00004051278,0.000117598,0.0000366095],"domain_scores_gemma":[0.9996897,0.00005216043,0.0001068653,0.00004822923,0.0000655176,0.00003747506],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004057372,0.00006641229,0.0004813295,0.0002444378,0.00001893601,0.0003005383,0.0001926386,0.006307745,0.9708343,0.008472112,0.0006551887,0.01238575],"study_design_scores_gemma":[0.00006076483,0.0008748012,0.003860156,0.00007869277,0.0000488335,0.001021393,0.0001902457,0.07258321,0.8729874,0.002017437,0.04618501,0.00009202302],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5347021,0.002310741,0.4392166,0.0003642422,0.0005118999,0.0001946947,0.0003822189,0.001502049,0.02081541],"genre_scores_gemma":[0.6422579,0.0009284121,0.3494914,0.0000969527,0.00009684144,0.0002106883,0.0003159188,0.0001114578,0.00649034],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00103843,"threshold_uncertainty_score":0.003714323,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0860287286425897,"score_gpt":0.3001307819926121,"score_spread":0.2141020533500224,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}