{"id":"W4386072888","doi":"10.11159/mmme23.112","title":"Sputtering of Ultra-thin Cu Nano-twinned Films on Si Wafers for Application in Advanced 3D-IC Packaging","year":2023,"lang":"en","type":"article","venue":"Proceedings of the World Congress on Mechanical, Chemical, and Material Engineering","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Hsinchu Science Park Bureau, Ministry of Science and Technology, Taiwan","keywords":"Wafer; Materials science; Sputtering; Optoelectronics; Nano-; Sputter deposition; Thin film; Nanotechnology; Composite material","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006873245,0.0001818368,0.0001372106,0.0001248097,0.0001231906,0.0001534835,0.0002083351,0.0001784402,0.0005218295],"category_scores_gemma":[0.0001608055,0.000221133,0.0001198757,0.0001202197,0.0001017941,0.0001718867,0.0001359226,0.0001878675,0.0001214889],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000131126,"about_ca_system_score_gemma":0.0001131032,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005843076,"about_ca_topic_score_gemma":0.001763554,"domain_scores_codex":[0.9999535,0.000002872989,0.000003709121,0.00001317091,0.00001836963,0.000008432662],"domain_scores_gemma":[0.9999456,0.000009776386,0.00001207759,0.000008777497,0.00001751404,0.000006187195],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001014546,0.000002088334,0.0001230141,0.00004259887,0.0000040889,0.00006263975,0.00001268751,0.0000698629,0.9986131,0.00002655022,0.0000394742,0.0009936673],"study_design_scores_gemma":[0.000004211673,0.00007986496,0.003767147,0.000006279422,0.00001239971,0.0001525203,0.00003075831,0.001499841,0.9933131,0.00001635574,0.001113281,0.000004180994],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.992485,0.001612983,0.003888295,0.00004030586,0.00007117227,0.00002262712,0.0001310605,0.00005876096,0.001689712],"genre_scores_gemma":[0.9898149,0.0007820075,0.00825887,0.00002441818,0.00001104407,0.00001564028,0.0001338725,0.0000176817,0.0009415196],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0005843076,"threshold_uncertainty_score":0.001745701,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007679251785211376,"score_gpt":0.2285418708574702,"score_spread":0.2208626190722588,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}