{"id":"W4386072888","doi":"10.11159/mmme23.112","title":"Sputtering of Ultra-thin Cu Nano-twinned Films on Si Wafers for Application in Advanced 3D-IC Packaging","year":2023,"lang":"en","type":"article","venue":"Proceedings of the World Congress on Mechanical, Chemical, and Material Engineering","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Hsinchu Science Park Bureau, Ministry of Science and Technology, Taiwan","keywords":"Wafer; Materials science; Sputtering; Optoelectronics; Nano-; Sputter deposition; Thin film; Nanotechnology; Composite material","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004658863,0.0002202214,0.000400389,0.0001426791,0.00005320044,0.00005719735,0.0003819983,0.00008776517,0.000017468],"category_scores_gemma":[0.0003004672,0.0001701836,0.00008139258,0.0002950958,0.00006330009,0.0001173609,0.0001444635,0.0001239559,0.00000205743],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000460299,"about_ca_system_score_gemma":0.000009819159,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001365262,"about_ca_topic_score_gemma":0.000002697358,"domain_scores_codex":[0.9985374,0.000005543175,0.0004896207,0.0004304759,0.0002053367,0.0003315883],"domain_scores_gemma":[0.9993052,0.0001757,0.0001887931,0.0001805008,0.00008505638,0.00006476617],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002721928,0.00004099313,0.00001742052,0.0006661318,0.00000730741,1.57535e-7,0.00002695134,0.0006186172,0.9961901,0.001798217,0.00009670115,0.0002652191],"study_design_scores_gemma":[0.0005560528,0.0000766314,0.00002152225,0.000720109,0.0000136302,0.000001040835,0.00008114639,0.007546447,0.9902149,0.0003761039,0.0002087402,0.0001836704],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9980757,0.000003066806,0.000008428806,0.0002298979,0.0009214773,0.0005492295,0.00003967403,0.0001148445,0.00005768732],"genre_scores_gemma":[0.998406,0.00001728491,0.001227813,0.00003895216,0.00006934076,0.0001560271,0.000004491742,0.00003416739,0.00004590155],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00692783,"threshold_uncertainty_score":0.6939886,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007679251785211376,"score_gpt":0.2285418708574702,"score_spread":0.2208626190722588,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}