{"id":"W4386098347","doi":"10.1116/6.0002896","title":"Mechanical and optical properties of amorphous silicon nitride-based films prepared by electron cyclotron resonance plasma-enhanced chemical vapor deposition","year":2023,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada; Ontario Research Foundation","keywords":"Materials science; Nanoindentation; Electron cyclotron resonance; Thin film; Optoelectronics; Plasma-enhanced chemical vapor deposition; Chemical vapor deposition; Silicon nitride; Silicon oxynitride; Solar cell; Composite material; Silicon; Nanotechnology; Plasma","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0006207375,0.0003200921,0.0006367721,0.0007892696,0.0001721034,0.00005861827,0.000632296,0.0004847701,0.000004949716],"category_scores_gemma":[0.0002248165,0.0002675354,0.00008991639,0.001674367,0.001317355,0.0004024781,0.0001338758,0.0007527616,0.000002187073],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009590731,"about_ca_system_score_gemma":0.0001258385,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000006289155,"about_ca_topic_score_gemma":0.000004552936,"domain_scores_codex":[0.9976093,0.00002254527,0.0007432175,0.0004364444,0.0005173633,0.0006711723],"domain_scores_gemma":[0.9990098,0.00008910832,0.0002480165,0.0003270062,0.0001907253,0.0001353032],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001715973,0.00005851489,0.0001786214,0.00008400317,0.00002916759,0.00001889173,0.00008680134,0.0007672439,0.9969688,0.0001619888,0.0002292934,0.001245065],"study_design_scores_gemma":[0.0008221979,0.0006510119,0.0006017947,0.0001969003,0.00004970386,0.000159181,0.0003205299,0.03051128,0.9659643,0.0004045674,0.0000465434,0.0002719755],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9939152,0.003822296,0.0005463829,0.0006175685,0.0001778495,0.0002386303,0.00002371795,0.0006425431,0.00001583824],"genre_scores_gemma":[0.9939635,0.0008222071,0.005127237,0.00001088151,0.000008947703,0.00002039975,0.000001484649,0.00003331789,0.00001198771],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0310045,"threshold_uncertainty_score":0.9999777,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007237858091151174,"score_gpt":0.2049817701985956,"score_spread":0.1977439121074445,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}