{"id":"W4386127183","doi":"10.1088/2631-7990/acf3b8","title":"Material manufacturing from atomic layer","year":2023,"lang":"en","type":"article","venue":"International Journal of Extreme Manufacturing","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":23,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"Basic and Applied Basic Research Foundation of Guangdong Province; National Key Research and Development Program of China; National Natural Science Foundation of China","keywords":"Atomic layer deposition; Atomic units; Controllability; Status quo; Nanotechnology; Layer (electronics); Materials science; Computer science; Physics; Mathematics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.000182706,0.0001925788,0.0002510096,0.0003409738,0.00003257558,0.0002273072,0.000545544,0.00007855366,0.001392351],"category_scores_gemma":[0.00001404642,0.0001735836,0.0001320996,0.00003298122,0.00001708904,0.000453165,0.00009777354,0.0001633531,0.0002287289],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001149444,"about_ca_system_score_gemma":0.00001373901,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00005557914,"about_ca_topic_score_gemma":0.000009125963,"domain_scores_codex":[0.9985948,0.00002046168,0.0005564252,0.0001346894,0.0004545444,0.0002391101],"domain_scores_gemma":[0.9994732,0.00007745413,0.0001692818,0.0001328486,0.00005762048,0.00008961925],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001332627,0.00002185796,0.0006266622,0.0000376293,0.0006206193,0.0006048545,0.0004315805,0.01222431,0.9695169,0.00003230379,0.005203742,0.01054632],"study_design_scores_gemma":[0.0004984811,0.00001072718,0.01215302,0.0001017148,0.0000195963,0.00007216708,0.00009247186,0.0004981924,0.9696692,0.001608271,0.01508567,0.0001904982],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9883357,0.00009924372,0.0001109811,0.0001047751,0.01036158,0.00004196529,0.00006570912,0.0002067976,0.0006732679],"genre_scores_gemma":[0.9968645,0.0001832608,0.0003266859,0.00005731872,0.002421502,0.000002049359,0.00003185442,0.00004705536,0.00006577093],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01172612,"threshold_uncertainty_score":0.9995205,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03509361042349527,"score_gpt":0.2479365610942151,"score_spread":0.2128429506707198,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}