{"id":"W4386823568","doi":"10.31438/trf.hh2022.61","title":"ROOM TEMPERATURE SEAL-RING AU-TO-AU BONDING HERMETICITY AND RELIABILITY TESTING","year":2022,"lang":"en","type":"article","venue":"","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalsa Corporation; Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Microelectromechanical systems; Materials science; Wafer; Fabrication; Reliability (semiconductor); Seal (emblem); Wafer-level packaging; Wafer bonding; Anodic bonding; Electronic packaging; Bonding strength; Composite material; Optoelectronics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002225408,0.0001330401,0.000148685,0.00008726172,0.0003365387,0.00003532297,0.0001479919,0.00005775957,0.00004431814],"category_scores_gemma":[0.0002686052,0.0001283404,0.00002295473,0.0004127418,0.00002363529,0.00008215079,0.0003295921,0.0003895132,0.000005034926],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002895415,"about_ca_system_score_gemma":0.00002491765,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002165296,"about_ca_topic_score_gemma":0.00003670704,"domain_scores_codex":[0.9991549,0.00001698695,0.0001485177,0.0002261792,0.0001311881,0.0003222605],"domain_scores_gemma":[0.9995596,0.0001122696,0.00001225486,0.0002319014,0.00001742313,0.00006649686],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"observational","study_design_gemma":"observational","study_design_scores_codex":[0.00001751983,0.00007473477,0.439979,0.0005051353,0.00006153686,0.00005825585,0.002724014,0.2604701,0.2638362,0.007627147,0.005007903,0.01963848],"study_design_scores_gemma":[0.001707112,0.0007623716,0.5098665,0.0002431915,0.0001144294,0.0003076802,0.01894872,0.1784166,0.245321,0.008010293,0.03301917,0.003282965],"study_design_candidate":"observational","study_design_consensus":"observational","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.986717,0.00005879984,0.0004284117,0.0003727665,0.000180779,0.0001439196,0.000006296731,0.001361879,0.01073012],"genre_scores_gemma":[0.9918913,0.00000167385,0.007574042,0.00005247946,0.00004030391,0.0000263052,0.000001476394,0.00002178687,0.0003906424],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.08205348,"threshold_uncertainty_score":0.523357,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01167744570538138,"score_gpt":0.2069558990040684,"score_spread":0.195278453298687,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}