{"id":"W4386823568","doi":"10.31438/trf.hh2022.61","title":"ROOM TEMPERATURE SEAL-RING AU-TO-AU BONDING HERMETICITY AND RELIABILITY TESTING","year":2022,"lang":"en","type":"article","venue":"","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalsa Corporation; Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Microelectromechanical systems; Materials science; Wafer; Fabrication; Reliability (semiconductor); Seal (emblem); Wafer-level packaging; Wafer bonding; Anodic bonding; Electronic packaging; Bonding strength; Composite material; Optoelectronics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007039158,0.0003559941,0.0003534314,0.0002868746,0.0003068779,0.0001969588,0.0004493204,0.0004493216,0.001359511],"category_scores_gemma":[0.001265492,0.0002694247,0.0002309022,0.0002092469,0.0002897095,0.0003209622,0.0003495959,0.000358401,0.0003411394],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000158119,"about_ca_system_score_gemma":0.0001571942,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006035983,"about_ca_topic_score_gemma":0.000640618,"domain_scores_codex":[0.9995595,0.00005474386,0.00003500114,0.00008615654,0.0001890787,0.00007545385],"domain_scores_gemma":[0.9990824,0.0001919675,0.0001508841,0.00018005,0.0003457496,0.00004893307],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000106255,0.0000303437,0.001293403,0.00005704581,0.00001158742,0.0001340951,0.0002386565,0.0007442505,0.9936405,0.000157365,0.0001473564,0.003439129],"study_design_scores_gemma":[0.0000107877,0.001330136,0.00793968,0.000006979769,0.00002649253,0.0002180198,0.0001118006,0.005982432,0.9825052,0.00008939277,0.001751649,0.00002746975],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9889051,0.0003866878,0.009176966,0.00004489048,0.00003895788,0.00006600286,0.0001818538,0.0002361839,0.0009634296],"genre_scores_gemma":[0.9905729,0.0002100044,0.007592855,0.00001229905,0.000009872976,0.00006480011,0.0001231107,0.0000434032,0.001370719],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001359511,"threshold_uncertainty_score":0.004548073,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01167744570538138,"score_gpt":0.2069558990040684,"score_spread":0.195278453298687,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}