{"id":"W4386913568","doi":"10.1016/j.mne.2023.100227","title":"Wafer-bonded deep fluidics in BCB with in-plane coupling for lab-on-a-chip applications","year":2023,"lang":"en","type":"article","venue":"Micro and Nano Engineering","topic":"Microfluidic and Capillary Electrophoresis Applications","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Ottawa","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Wafer; Materials science; Fluidics; Wafer dicing; Wafer bonding; Microfluidics; Anodic bonding; Deep reactive-ion etching; Etching (microfabrication); Optoelectronics; Nanotechnology; Reactive-ion etching; Electrical engineering; Layer (electronics); Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002694956,0.0007347182,0.0004795004,0.0003660127,0.0005171818,0.0005023825,0.0006835714,0.0004551996,0.001424575],"category_scores_gemma":[0.0004362248,0.0004896627,0.0002196172,0.000344497,0.0003596499,0.0005341353,0.0005923206,0.0009128746,0.001187573],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007135665,"about_ca_system_score_gemma":0.0007100198,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002224845,"about_ca_topic_score_gemma":0.003532645,"domain_scores_codex":[0.9997031,0.00002479413,0.00001260003,0.0000732205,0.0001514465,0.00003470196],"domain_scores_gemma":[0.9997675,0.00004616953,0.00006914666,0.00004899615,0.00004343978,0.00002481967],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001518934,0.00001832993,0.00009125206,0.00006551431,0.000003641755,0.00003154995,0.00001891976,0.0002898878,0.9950908,0.0002968107,0.0001680052,0.003909968],"study_design_scores_gemma":[0.00001213485,0.0001224553,0.0008641792,0.00001018936,0.000009680383,0.0001635799,0.00001064219,0.002947729,0.9878588,0.0001973219,0.007787465,0.00001575146],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6212506,0.005470118,0.3554388,0.0005565745,0.0003795631,0.0005085713,0.001299391,0.003304047,0.0117924],"genre_scores_gemma":[0.6038853,0.00224068,0.3853001,0.0002271338,0.00005839942,0.0003553711,0.0008414623,0.0002887194,0.006802879],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002224845,"threshold_uncertainty_score":0.005177379,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005455241255076016,"score_gpt":0.1895141445092041,"score_spread":0.1840589032541281,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}