{"id":"W4387214111","doi":"10.1016/j.tsf.2023.140069","title":"In-situ monitoring of stress evolution in high power impulse magnetron sputtering-deposited Ti-Al-N films: Effect of substrate bias and temperature","year":2023,"lang":"en","type":"article","venue":"Thin Solid Films","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":false,"ca_institutions":"Polytechnique Montréal","funders":"","keywords":"Materials science; High-power impulse magnetron sputtering; Residual stress; Stress (linguistics); Sputter deposition; Substrate (aquarium); Biasing; Composite material; Sputtering; Thin film; Nanotechnology; Electrical engineering; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001176149,0.0002616135,0.0001985973,0.0001666051,0.0002657082,0.0002200442,0.000346687,0.000367647,0.001617521],"category_scores_gemma":[0.0002450971,0.0001834904,0.0001243198,0.0002524588,0.0003003282,0.0002768969,0.0001378962,0.0003119977,0.0001329027],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002081636,"about_ca_system_score_gemma":0.0001164287,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00116944,"about_ca_topic_score_gemma":0.002430997,"domain_scores_codex":[0.9999087,0.000009092456,0.000005237532,0.00002619955,0.00002899796,0.0000217467],"domain_scores_gemma":[0.9998055,0.00007275993,0.00004368342,0.00001636723,0.00003935824,0.0000222724],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001595873,0.00001885627,0.0009191574,0.00003033146,0.000005949645,0.00008998569,0.00006931269,0.00005574171,0.997532,0.00001697029,0.00003750196,0.001064598],"study_design_scores_gemma":[0.00001170377,0.0002381662,0.02200358,0.000003543779,0.0000124164,0.0001691116,0.0001420933,0.001577158,0.9754621,0.00002437127,0.0003493943,0.000006302805],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9985633,0.0001487243,0.0006411682,0.00003219262,0.00001610647,0.0000055258,0.00008541701,0.00002715182,0.0004804519],"genre_scores_gemma":[0.9987683,0.00008761968,0.0004814654,0.00001042088,0.000008171114,0.000005359514,0.00005511982,0.000007578293,0.0005759568],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001617521,"threshold_uncertainty_score":0.005411148,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008063353972687218,"score_gpt":0.2267184998297833,"score_spread":0.2186551458570961,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}