{"id":"W4387251422","doi":"10.1109/dtip58682.2023.10267939","title":"Low-temperature joining of semiconductor substrates and thin layers on solid and flexible wafers by solid-liquid inter-diffusion bonding using a low-thickness Ni-Sn system","year":2023,"lang":"en","type":"article","venue":"","topic":"Electronic Packaging and Soldering Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"Université de Sherbrooke","keywords":"Materials science; Wafer; Wafer bonding; Semiconductor; Diffusion; Polyimide; Phase (matter); Composite material; Bonding in solids; Optoelectronics; Metallurgy; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0003171825,0.000313108,0.0004396266,0.0003435129,0.0001649029,0.00009822606,0.0001639453,0.0002983698,0.000003055286],"category_scores_gemma":[0.0000461196,0.0002835684,0.00004564928,0.0004186235,0.0000961977,0.0002035905,0.000117024,0.0005040249,0.000002774589],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001403117,"about_ca_system_score_gemma":0.00003035945,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004831721,"about_ca_topic_score_gemma":0.00001030435,"domain_scores_codex":[0.9985743,0.00003056481,0.0003432042,0.0003548699,0.0001674803,0.0005295617],"domain_scores_gemma":[0.9994605,0.00009908577,0.00006723354,0.0002620974,0.00003400586,0.00007708745],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000221568,0.000009208851,0.000160225,0.0008154623,0.00006140101,0.00001044118,0.0009571722,0.0049361,0.9916564,0.0006990933,0.0005834698,0.00008887888],"study_design_scores_gemma":[0.0003756376,0.0001150236,0.00002440597,0.001720481,0.00002149721,0.0000431199,0.005137219,0.09324926,0.8989143,0.00005253162,0.00001827611,0.0003282072],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9961211,0.0005970346,0.0001973169,0.00009403413,0.0002613714,0.0001507438,0.00001362552,0.002327241,0.0002375111],"genre_scores_gemma":[0.9992142,0.0002479935,0.0002182102,0.00001882352,0.00002803619,0.00000975818,0.00001293886,0.00006339879,0.0001865879],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.09274205,"threshold_uncertainty_score":0.9999617,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01580521171522381,"score_gpt":0.2520791635383945,"score_spread":0.2362739518231707,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}