{"id":"W4387303214","doi":"10.1117/12.2677780","title":"Fabrication and characterization of zone plates for EUV applications","year":2023,"lang":"en","type":"article","venue":"","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Applied Nanotools (Canada)","funders":"University of Alberta","keywords":"Extreme ultraviolet lithography; Materials science; Fabrication; Zone plate; Etching (microfabrication); Optics; Electron-beam lithography; Molybdenum; Characterization (materials science); Lithography; Diffraction; Diffraction efficiency; Optoelectronics; Scanning electron microscope; Dry etching; Resist; Nanotechnology; Composite material; Metallurgy; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00003356783,0.00003680329,0.0000479565,0.00008657602,0.00001682377,0.000003652368,0.00003073531,0.00002007202,0.00000475535],"category_scores_gemma":[0.000002904323,0.00003837846,0.0000100342,0.0002112972,0.00001233592,0.00006589689,0.000007412335,0.00001219091,0.00000129925],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000004549757,"about_ca_system_score_gemma":9.387129e-7,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":6.977559e-7,"about_ca_topic_score_gemma":2.815349e-7,"domain_scores_codex":[0.9997675,0.000001293764,0.00009258652,0.00005663723,0.00002815871,0.00005378796],"domain_scores_gemma":[0.9998445,0.00002038641,0.00001723858,0.00007804471,0.00002932914,0.00001048173],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000002584069,0.00001125661,0.001490388,0.0001694671,0.00002053774,2.284018e-8,0.00008026852,0.00009882016,0.9163861,0.01329956,0.000257788,0.06818324],"study_design_scores_gemma":[0.0002091271,0.00003655081,0.03297074,0.00002007811,0.00001715169,6.192195e-7,0.00004688527,0.066877,0.8446624,0.007589419,0.04738446,0.0001855338],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.06364784,0.00001293506,0.93478,0.00001320796,0.00001840461,0.000431308,0.00003480278,0.0006063117,0.0004551618],"genre_scores_gemma":[0.9696385,0.0003207846,0.0287325,0.00000870477,0.00002086522,0.000888836,0.0002210653,0.00001710237,0.000151627],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.9060475,"threshold_uncertainty_score":0.1565028,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01026818471036127,"score_gpt":0.2525262708432674,"score_spread":0.2422580861329061,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}