{"id":"W4387303214","doi":"10.1117/12.2677780","title":"Fabrication and characterization of zone plates for EUV applications","year":2023,"lang":"en","type":"article","venue":"","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Applied Nanotools (Canada)","funders":"University of Alberta","keywords":"Extreme ultraviolet lithography; Materials science; Fabrication; Zone plate; Etching (microfabrication); Optics; Electron-beam lithography; Molybdenum; Characterization (materials science); Lithography; Diffraction; Diffraction efficiency; Optoelectronics; Scanning electron microscope; Dry etching; Resist; Nanotechnology; Composite material; Metallurgy; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003392124,0.0005089059,0.0002883479,0.0006655945,0.0003681575,0.0005519555,0.0007167944,0.0005451228,0.002046421],"category_scores_gemma":[0.0005050826,0.0003926823,0.0003201228,0.0005503346,0.000325492,0.0002943554,0.0002755921,0.0005717368,0.001316204],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000487396,"about_ca_system_score_gemma":0.0006123407,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00134143,"about_ca_topic_score_gemma":0.00204496,"domain_scores_codex":[0.9996554,0.00001604256,0.00001612274,0.00005384107,0.0002162189,0.00004243436],"domain_scores_gemma":[0.9996014,0.0000644707,0.00007118881,0.00007212943,0.000163856,0.00002702767],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002018799,0.000007572778,0.00013147,0.00008249305,0.000004172062,0.00007747842,0.00004501241,0.0003186385,0.9961101,0.0002346515,0.0002145152,0.002753682],"study_design_scores_gemma":[0.00000267055,0.0000733923,0.001595937,0.000006550186,0.000005060477,0.0001163624,0.0000335496,0.0009825795,0.9923893,0.00003383332,0.004752788,0.000007957725],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8703217,0.003599374,0.09413394,0.0003274691,0.0002754005,0.0008430576,0.00544799,0.00198113,0.0230699],"genre_scores_gemma":[0.8145912,0.00243237,0.1656836,0.0001040894,0.00003018604,0.0005182596,0.002964671,0.0003241525,0.01335149],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002046421,"threshold_uncertainty_score":0.006846011,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01026818471036127,"score_gpt":0.2525262708432674,"score_spread":0.2422580861329061,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}