{"id":"W4387596692","doi":"","title":"Pulsed aerosol-assisted plasma processes for (multi)functional thin film deposition","year":2023,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Plasma Diagnostics and Applications","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Montréal","funders":"","keywords":"Aerosol; Plasma; Deposition (geology); Materials science; Thin film; Chemical engineering; Nanotechnology; Optoelectronics; Chemistry; Physics; Nuclear physics; Geology; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002018094,0.0003291376,0.0003010727,0.0001556053,0.0002040453,0.0005210494,0.0004390062,0.0005824757,0.005445041],"category_scores_gemma":[0.000192132,0.0001921179,0.000264639,0.000163802,0.0002032627,0.0004613813,0.0005307581,0.0005900633,0.001342261],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001943209,"about_ca_system_score_gemma":0.000103474,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001600654,"about_ca_topic_score_gemma":0.0002371028,"domain_scores_codex":[0.999863,0.000009987369,0.000005740845,0.00003214046,0.00006644395,0.00002273759],"domain_scores_gemma":[0.9999233,0.00002340359,0.00001064199,0.00001235239,0.00002035169,0.000009858896],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003314216,0.00001733655,0.00004819586,0.0001138222,0.000005400978,0.00006947985,0.00002652716,0.0001799561,0.9919537,0.0004406925,0.0004001742,0.006711554],"study_design_scores_gemma":[0.00002558089,0.0002954337,0.0009115752,0.000009589047,0.00001426423,0.0003837377,0.00003244768,0.008336995,0.9803616,0.000430204,0.009185784,0.00001276338],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8845178,0.01089267,0.07043494,0.0005508028,0.001280661,0.000160058,0.0003279533,0.0009960376,0.03083898],"genre_scores_gemma":[0.963751,0.001948633,0.02042734,0.0001302698,0.0001760488,0.00005333108,0.0001438147,0.0001135715,0.01325603],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.005445041,"threshold_uncertainty_score":0.01821548,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03392859308700261,"score_gpt":0.2369652125782764,"score_spread":0.2030366194912738,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}