{"id":"W4388197439","doi":"10.3390/micro3040057","title":"Enhancing Linearity in Parallel-Plate MEMS Varactors through Repulsive Actuation","year":2023,"lang":"en","type":"article","venue":"Micro","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure; McGill University","funders":"École de technologie supérieure; CMC Microsystems","keywords":"Varicap; Capacitance; Microelectromechanical systems; Variable capacitor; Linearity; Materials science; Voltage; Capacitor; Electrode; Optoelectronics; Electrical engineering; Electronic engineering; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007869554,0.0001052713,0.0001315947,0.00008816431,0.0000335251,0.00001580522,0.00008769206,0.0001141524,0.00001590543],"category_scores_gemma":[0.00007514349,0.0001049852,0.00002848739,0.0003588157,0.00001814206,0.000189306,0.00003820801,0.0002078295,0.0001204516],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006651141,"about_ca_system_score_gemma":0.000006012944,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00005208164,"about_ca_topic_score_gemma":0.000155426,"domain_scores_codex":[0.9993888,0.000002047181,0.0001690158,0.0001464556,0.00005758616,0.0002361289],"domain_scores_gemma":[0.9997253,0.0000534288,0.00002352742,0.000170612,0.00001307393,0.00001402886],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000003598926,0.000005506295,0.00008071755,0.0000233123,0.0000080176,0.00002064046,0.0005786245,0.005947882,0.9893602,0.00004350134,0.0004417972,0.00348626],"study_design_scores_gemma":[0.0002530966,0.00001434868,0.00346832,0.00004604962,0.000003315406,0.000002818414,0.0003128796,0.0006721789,0.975141,0.003811871,0.01608574,0.0001883572],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9936621,0.0001579992,0.004196275,0.00008294929,0.000305719,0.0001128643,0.000004510176,0.001059594,0.000418011],"genre_scores_gemma":[0.9914526,0.0008040721,0.007295143,0.00002774634,0.00005287342,0.00002725755,0.00002683677,0.00002970243,0.0002837988],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01564394,"threshold_uncertainty_score":0.4281173,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01796018801544742,"score_gpt":0.260121002164607,"score_spread":0.2421608141491596,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}