{"id":"W4388197439","doi":"10.3390/micro3040057","title":"Enhancing Linearity in Parallel-Plate MEMS Varactors through Repulsive Actuation","year":2023,"lang":"en","type":"article","venue":"Micro","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure; McGill University","funders":"École de technologie supérieure; CMC Microsystems","keywords":"Varicap; Capacitance; Microelectromechanical systems; Variable capacitor; Linearity; Materials science; Voltage; Capacitor; Electrode; Optoelectronics; Electrical engineering; Electronic engineering; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002964448,0.0003929529,0.0001894114,0.000306373,0.0002420184,0.0003982867,0.0007446872,0.0004238122,0.0006583018],"category_scores_gemma":[0.0006034008,0.0002412937,0.0001714031,0.0002389234,0.0003482345,0.0005655913,0.0004991136,0.0005512683,0.0004472745],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003453691,"about_ca_system_score_gemma":0.0002420036,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004868337,"about_ca_topic_score_gemma":0.001155046,"domain_scores_codex":[0.9996897,0.00003573025,0.00001241914,0.00005675248,0.000159555,0.00004584356],"domain_scores_gemma":[0.9996651,0.0001255146,0.00007012096,0.00002271446,0.00009078689,0.00002570532],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000284867,0.00001193283,0.0001459247,0.00002275806,0.000003444618,0.0000537013,0.00002049332,0.0004002886,0.994942,0.0005817009,0.00008335548,0.003705939],"study_design_scores_gemma":[0.00001735679,0.0002963992,0.0006499224,0.000006190559,0.00001293856,0.0003062875,0.00003481112,0.01949041,0.9753864,0.0003197766,0.003454165,0.00002538727],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7800906,0.002163649,0.2014524,0.0008184893,0.0003329421,0.00005713156,0.00009150971,0.0009795922,0.01401362],"genre_scores_gemma":[0.9667647,0.0005196861,0.02787022,0.000241103,0.0001067383,0.000023409,0.00004844841,0.00005761749,0.004368091],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007446872,"threshold_uncertainty_score":0.002505779,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01796018801544742,"score_gpt":0.260121002164607,"score_spread":0.2421608141491596,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}