{"id":"W4388494691","doi":"10.1557/s43578-023-01207-2","title":"A comprehensive calibration of integrated magnetron sputtering and plasma enhanced chemical vapor deposition for rare-earth doped thin films","year":2023,"lang":"en","type":"article","venue":"Journal of materials research/Pratt's guide to venture capital sources","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University; University of New Brunswick","funders":"Universidade Estadual de Campinas; Canadian Network for Research and Innovation in Machining Technology, Natural Sciences and Engineering Research Council of Canada; Mitacs; Killam Trusts; New Brunswick Innovation Foundation; Natural Sciences and Engineering Research Council of Canada; McMaster University","keywords":"Materials science; Sputter deposition; Sputtering; Silicon; Plasma-enhanced chemical vapor deposition; Dopant; Thin film; Chemical vapor deposition; Doping; High-power impulse magnetron sputtering; Optoelectronics; Analytical Chemistry (journal); Nanotechnology; Chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0009245542,0.0008471803,0.0004369158,0.0006904803,0.0002414944,0.0004030341,0.0009774435,0.0005937056,0.001603712],"category_scores_gemma":[0.0007481645,0.000485982,0.0002980246,0.0005411875,0.0001776001,0.0003517892,0.0004600569,0.000475874,0.0006672677],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004905153,"about_ca_system_score_gemma":0.0003333585,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001213027,"about_ca_topic_score_gemma":0.00265937,"domain_scores_codex":[0.9990038,0.00006167233,0.00004014511,0.0002081646,0.0006368184,0.00004949027],"domain_scores_gemma":[0.9996954,0.00006212756,0.00004727272,0.00006760955,0.0001201208,0.000007395086],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004595934,0.00002222724,0.0009243575,0.0001028407,0.00002870812,0.00003308585,0.00003498023,0.000483664,0.9855481,0.0001937549,0.0003899414,0.01219235],"study_design_scores_gemma":[0.000005529929,0.00009873364,0.002726702,0.00001027216,0.00002212029,0.00007866463,0.00001712874,0.005744623,0.9882777,0.00003892619,0.002967599,0.00001193753],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7075273,0.005706167,0.2594511,0.0003292265,0.0003193569,0.0007995766,0.00515106,0.006472844,0.01424346],"genre_scores_gemma":[0.8054779,0.002142122,0.1847179,0.0001043936,0.00003400328,0.0004709959,0.001825069,0.0003006496,0.004927005],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001603712,"threshold_uncertainty_score":0.005365014,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0257201082886585,"score_gpt":0.2950532968194836,"score_spread":0.2693331885308251,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}