{"id":"W4389237336","doi":"10.3390/coatings13122030","title":"High-Rate Epitaxial Growth of Silicon Using Electron Beam Evaporation at High Temperatures","year":2023,"lang":"en","type":"article","venue":"Coatings","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Institute of Gender and Health; Norges Forskningsråd; Universitetet i Oslo","keywords":"Materials science; Wafer; Ingot; Raman spectroscopy; Silicon; Evaporation; Electron beam physical vapor deposition; Analytical Chemistry (journal); Electron backscatter diffraction; Crystallinity; Microstructure; Chemical vapor deposition; Optoelectronics; Composite material; Optics; Chemistry","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001390577,0.0003008583,0.0002208511,0.0001563684,0.0001261787,0.0002799234,0.0003799624,0.0001990979,0.0005306549],"category_scores_gemma":[0.0001774843,0.0002170865,0.0001687583,0.0001924942,0.0001709675,0.0003642059,0.0002309936,0.0003318796,0.0002973529],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001844598,"about_ca_system_score_gemma":0.0001767376,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006252802,"about_ca_topic_score_gemma":0.002000916,"domain_scores_codex":[0.9998983,0.000007647947,0.000008675719,0.00002324384,0.00004687648,0.00001520982],"domain_scores_gemma":[0.9999317,0.00002022777,0.00001657486,0.00001298447,0.00001325707,0.000005307981],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008255874,0.000004031573,0.0001499282,0.00005760553,0.00000528395,0.00005386865,0.00001626729,0.0001616264,0.9975725,0.0001555304,0.00005200659,0.001763248],"study_design_scores_gemma":[0.000006690784,0.00004809496,0.00197525,0.000006861147,0.000006350924,0.0002198973,0.00001214816,0.001908968,0.9927804,0.00005925685,0.002969512,0.000006451854],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9288155,0.00422127,0.056672,0.0001493948,0.0001224057,0.0001390572,0.0006011559,0.0003233553,0.008955753],"genre_scores_gemma":[0.9248374,0.003894668,0.06598964,0.00004278323,0.0000281008,0.00005361396,0.000388942,0.00007529982,0.004689521],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006252802,"threshold_uncertainty_score":0.001775265,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01021045660657078,"score_gpt":0.211095455138429,"score_spread":0.2008849985318582,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}