{"id":"W4390064069","doi":"10.1063/5.0170100","title":"Effects of elevated-temperature deposition on the atomic structure of amorphous Ta2O5 films","year":2023,"lang":"en","type":"article","venue":"APL Materials","topic":"High-pressure geophysics and materials","field":"Earth and Planetary Sciences","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Montréal; Polytechnique Montréal","funders":"Natural Sciences and Engineering Research Council of Canada; Ministry of Science and ICT, South Korea; Gordon and Betty Moore Foundation; National Research Foundation of Korea; Fonds de recherche du Québec – Nature et technologies; National Research Foundation; Office of Naval Research; Polytechnique Montréal; National Science Foundation","keywords":"Amorphous solid; Materials science; Annealing (glass); Deposition (geology); Glass transition; Thin film; Atmospheric temperature range; Scattering; Atomic layer deposition; Composite material; Analytical Chemistry (journal); Condensed matter physics; Nanotechnology; Optics; Polymer; Crystallography; Thermodynamics; Chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.0001809667,0.0001386761,0.0002993674,0.00005297392,0.00007624447,0.00005079016,0.0002078704,0.0001016156,0.001385383],"category_scores_gemma":[0.00004268373,0.00008313849,0.00004236402,0.0001918553,0.00005429247,0.00006042147,0.00001766416,0.0000456234,0.000155966],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000001087411,"about_ca_system_score_gemma":0.00001849132,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008509008,"about_ca_topic_score_gemma":0.00003631662,"domain_scores_codex":[0.9989878,0.0001770227,0.0002619186,0.0001669491,0.0002083784,0.0001979283],"domain_scores_gemma":[0.9993032,0.0002370543,0.0001734915,0.0002211055,0.00003672179,0.00002846554],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008285652,0.000006796232,0.0002119085,0.000180312,0.00003387368,0.000008570809,0.00009856324,0.0001046782,0.9965045,0.0005479301,0.002165046,0.00005500133],"study_design_scores_gemma":[0.0001627036,0.0001065448,0.06524785,0.00006657022,0.00002821054,0.000002097355,0.00001352587,0.00001129333,0.9326336,0.001564856,0.00007629796,0.00008649436],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9973317,0.00003466187,4.424671e-7,0.00006350063,0.0011077,0.0003269136,0.001041988,0.00004331955,0.00004975606],"genre_scores_gemma":[0.9993036,0.00003693982,0.00003096386,0.00009422838,0.0001324934,0.00000249474,0.0003433399,0.000007063039,0.00004891003],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.06503594,"threshold_uncertainty_score":0.9995275,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004027229670211822,"score_gpt":0.1793485897226252,"score_spread":0.1753213600524134,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}