{"id":"W4390822547","doi":"10.1116/6.0003322","title":"Fabrication of blazed gratings by tilted reactive ion beam etching with the side mask for augmented reality applications","year":2024,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Ontario Ministry of Research and Innovation; Industry Canada","keywords":"Materials science; Fabrication; Optics; Shadow mask; Resist; Lithography; Etching (microfabrication); Reactive-ion etching; Electron-beam lithography; Optoelectronics; Nanotechnology; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002018995,0.000611558,0.0003316171,0.0002688509,0.0001431396,0.0002492917,0.0005314337,0.0004662777,0.0004416897],"category_scores_gemma":[0.0001921095,0.0004890374,0.0003377548,0.0002251768,0.0002409554,0.0003390423,0.0002670076,0.0004728684,0.0003674433],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002403986,"about_ca_system_score_gemma":0.0003534797,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006696841,"about_ca_topic_score_gemma":0.001611975,"domain_scores_codex":[0.9997634,0.00001499992,0.00001347538,0.00005942526,0.0001173242,0.00003135241],"domain_scores_gemma":[0.9998063,0.00002090426,0.00005978165,0.00004422326,0.00005117977,0.00001761437],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008510183,0.00000493793,0.00007351873,0.00002908822,0.000004174583,0.00004060415,0.00001377295,0.00009725967,0.9972541,0.0000977649,0.00006449645,0.002311748],"study_design_scores_gemma":[0.00001062956,0.0001338784,0.001648842,0.000003992215,0.00001113513,0.000494678,0.00001206271,0.004662683,0.9900519,0.00005276566,0.002898365,0.00001908239],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6388129,0.003856879,0.347525,0.0002818691,0.0004635628,0.0002210575,0.0006839918,0.001978599,0.00617622],"genre_scores_gemma":[0.5865601,0.001447443,0.40764,0.0001494874,0.0000505561,0.00009306541,0.0004134527,0.000128767,0.003517099],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006696841,"threshold_uncertainty_score":0.001744211,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01105431146844894,"score_gpt":0.2484857737817231,"score_spread":0.2374314623132741,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}