{"id":"W4390859276","doi":"10.32388/9ve08b","title":"Review of: \"Different methods for obtaining one-dimensional nanoarrays have been mentioned, among them are methods based on lithography (electron beam lithography, optical lithography, electric lithography, ion beam lithography, lithography by scanning microscopes)\"","year":2024,"lang":"en","type":"preprint","venue":"Qeios","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Ontario Science Centre","funders":"","keywords":"Lithography; Next-generation lithography; Stencil lithography; X-ray lithography; Electron-beam lithography; Computational lithography; Maskless lithography; Extreme ultraviolet lithography; Ion beam lithography; Materials science; Photolithography; Nanotechnology; Optics; Optoelectronics; Resist; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow","metaepi_broad","bibliometrics","scholarly_communication","research_integrity"],"consensus_categories":["metaepi_narrow","research_integrity"],"category_scores_codex":[0.009432584,0.004992496,0.006383584,0.01226419,0.001103106,0.001090544,0.003455314,0.003322247,0.0001456946],"category_scores_gemma":[0.0005348344,0.004973221,0.01122526,0.01363689,0.001357409,0.0005667076,0.001121122,0.006395243,0.00001132395],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003897735,"about_ca_system_score_gemma":0.0004328587,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001469131,"about_ca_topic_score_gemma":0.000007677409,"domain_scores_codex":[0.9786409,0.003116514,0.005934377,0.005559602,0.002602726,0.004145877],"domain_scores_gemma":[0.9857763,0.003105914,0.002670755,0.004696944,0.002004778,0.001745309],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.002034577,0.008162786,0.03155974,0.1125052,0.01915517,0.00006023221,0.001444545,0.001280769,0.2641571,0.005375678,0.04666298,0.5076012],"study_design_scores_gemma":[0.00590844,0.005300765,0.01305192,0.1215394,0.01366963,0.0001079793,0.000440502,0.01605655,0.6117441,0.02235176,0.1744319,0.01539704],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"review","genre_gemma":"methods","genre_scores_codex":[0.03112922,0.5774778,0.3488793,0.001029933,0.004270932,0.01981602,0.003588799,0.009602561,0.004205397],"genre_scores_gemma":[0.1044677,0.1176091,0.7503564,0.001954875,0.00117521,0.01695397,0.005058907,0.002289155,0.000134688],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.4922042,"threshold_uncertainty_score":0.9999464,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01953472868507175,"score_gpt":0.3293620766342339,"score_spread":0.3098273479491622,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}