{"id":"W4391639670","doi":"10.1149/ma2023-02161171mtgabs","title":"Optical and Mechanical Properties of Si-Based Thin Films for Photonic Applications","year":2023,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Materials science; Photonics; Optoelectronics; Plasma-enhanced chemical vapor deposition; Doping; Dopant; Silicon; Thin film; Silicon oxynitride; Sputter deposition; Photoluminescence; Silicon photonics; Chemical vapor deposition; Nanotechnology; Sputtering; Silicon nitride","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002654745,0.00008361343,0.0001373707,0.00003970589,0.00004042179,0.00002939677,0.00007051372,0.00006588283,0.000007267625],"category_scores_gemma":[0.0001014795,0.00007352651,0.00002766627,0.00007100085,0.00002392412,0.00003762495,0.00001558167,0.00005041876,0.00001434679],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000006722355,"about_ca_system_score_gemma":0.000015074,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001373805,"about_ca_topic_score_gemma":0.000003005578,"domain_scores_codex":[0.9994172,0.00000552455,0.0002214297,0.0001179723,0.0000796396,0.000158242],"domain_scores_gemma":[0.9996427,0.0001371754,0.00003530123,0.0001094047,0.00002899296,0.00004647398],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000005965621,0.000008966279,0.0000079037,0.0003410169,0.000008973255,3.725505e-7,0.00005186706,0.02908487,0.9702574,0.00004302973,0.000127875,0.00006176686],"study_design_scores_gemma":[0.0001545528,0.00001616112,0.0001969221,0.00009023595,0.00001205517,9.314371e-7,0.00008882132,0.04754321,0.9507212,0.0001281317,0.0009611744,0.00008660703],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9974835,0.0001997698,0.00002320587,0.00004455826,0.0001288054,0.0002538943,0.00001542558,0.0002799653,0.001570912],"genre_scores_gemma":[0.9971647,0.00001347683,0.002589052,0.0000165097,0.00005262202,0.0001180205,0.00001070727,0.00002319902,0.00001165689],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0195362,"threshold_uncertainty_score":0.2998324,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02802637864512983,"score_gpt":0.2381033493885783,"score_spread":0.2100769707434484,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}